Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: N (NPT), Port Size: 01 [Rc(PT)1/8], Temperature Option: H (High Temperature, -5 to 80°C)

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/8, Types of Screw: NPT, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 5, Option: High-Temperature Specification

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(Refer to pages 15-6-3 to 15-6-5 for details.) 15-13-1 Series ASV Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Effective area (mm 2) Effective area (mm 2) Inlet pressure (MPa) Number of needle

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: F (G), Port Size: 01 [Rc(PT)1/8], Temperature Option: L (Low Temperature, -30 to 60°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: Rc(PT), Port Size: 01 [Rc(PT)1/8], Temperature Option: L (Low Temperature, -30 to 60°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: N (NPT), Port Size: 02 [Rc(PT) 1/4], Temperature Option: L (Low Temperature, -30 to 60°C)

Size: 2 (1/4 Basis), Construction: 0 (Diaphragm Style), Basis: 0 (M5X0.8), Thread: Rc(PT), Port Size: 02 [Rc(PT) 1/4], Temperature Option: L (Low Temperature, -30 to 60°C)

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/8, Types of Screw: Rc, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 5, Option: Low-Temperature Specification

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/4, Types of Screw: Rc, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 7, Option: Low-Temperature Specification

Type: Quick Exhaust Valves, Body Material: Aluminum Diecast, Adhesive Material: Nitrile Rubber, Input Side, Port Type P (P1): Female Thread, Output Side Port Type A: Female Thread, Exhaust Side Port Type R: Female Thread, Connection Dia.: 1/4, Types of Screw: NPT, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 7, Option: Low-Temperature Specification

Size: 1/4 Basis, Construction: Diaphragm Style, Basis: M5X0.8, Thread: G, Port Size: 01 [Rc(PT)1/8], Temperature Option: Low Temperature, -30 to 60°C

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

rotations Number of needle rotations OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Number of needle rotations Number of needle rotations Inlet pressure (MPa) IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Effective area (mm 2) Flow rate (l/min

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Silencer Series AN

M5) AN110-01 (1 8 PT) AN101-01 (1 8 PT) D I M E N S I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

30

22 24.6 28.8 D M L A D Q N O M M L L Note 1) D is maximum diameter.

Digital Pressure Switch ( compatible)

-M)-: 334 (0x014E) ISE20B-L-P-: 335 (0x014F) ZSE20B-L(-M)-: 336 (0x0150) Device ID ZSE20B-L-P-: 337 (0x0151) ZSE20BF-L(-M)-: 338 (0x0152) ZSE20BF-L-P-: 339 (0x0153) 6: The configuration file can be downloaded from the SMC website, https://www.smcworld.com -91No.PS-OMV0006-D Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number of needle