V100

P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

5/16'' EX510 Gateway-type Serial Transmission System Type 20SA 5 port body ported 10-SYJ5000 R P R P. 325 Type 21SA 5 port body ported 10-SYJ3000 P. 297 10-SYJ7000 R P P. 355 Type 32SA 4 port base mounted 10-SYJ3000 R P P. 298 Type 41SA 5 port base mounted 10-SYJ5000 P. 326 10-SYJ7000 P R P. 356 Type 42SA 5 port base mounted 10-SYJ5000 R P P. 326 Type 43SA 5 port base mounted 10-SYJ5000 P

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

. 1 2 1 2 R NL NL: Neon light R: Register LED: Light emitting diode R: Register R LED 174 Series 10-SY Specific Product Precautions 6 Be sure to read this before handling.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M3 M5 1/8 4 6 8 N3 N7 N9 10-SYJ3000 Body ported Base mounted 10-SYJ5000 Top 10-SYJ7000 Side 10-SYJ3000 Bottom Side 10-SYJ5000 Bottom Side 10-SYJ7000 Bottom Body ported Type 21P A, B port P port Individual SUP spacer assembly R port Base mounted P port P Type 32P R port A, B port R port A, B port P port Mixed mounting of 3 port valves and 4, 5 port valves Individual EXH spacer assembly

KJ

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

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8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

F

) SMC design gives high flow for given tube size Large range of tube sizes from 4mm to 16mm Fittings from 10 Torr (vacuum) to 10 bar Threads come with applied sealant (no tape required) P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R SINGLE BANJO: KQVS/KQ2VS 6mm R 14 (Allen) TWIN MALE ELBOW

ZP

R 10 39.5 23.4 12.5 10 G2 2 M10 04 06 A10 14 3 10 10 2 6 10 85 51 x 1 23 20 123 61 51 30 133 71 40 169 81 77 50 179 91 30 (Rotating angle) 13 16 40 23.9 13 10.5 10 to 32 10 126.5 58.5 S N S U F GN GS 20 123.5 68.5 30 133.5 78.5 50 178.5 98.5 75 50 20 25 46.5 29.3 15.5 12.5 J K Mounting Bracket Assembly Thin Flat Type with Ribs ZP R F Width across flats Q 2 12 3 10 127 59 47 29.8 16 13 50

V

E O U T S I D E D I A M E T E R Metric (mm) 06 6 08 8 10 10 12 12 Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 3 Universal T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10

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-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

SY

SY5240(R)-M-02 DIN terminal (D): SY5240(R)-D-02 Manifold spec. sheets Order made Type 45 Type 45Applicable cable O.D. 3.5 to 7 81.7 74.2 145.2 Max. 10 62.9 Pg.7 18 18 147 28 9.5 22 Grommet .

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B 48 52.5 54 N 5.5 5.5 6.6 O1 M6 x 1 M6 x 1 M8 x 1.25 R 10 10 14 Model RSQA32 RSQA40 RSQA50 These 3 figures show the piston rod extended.

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Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

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3 r y e @6 @5 @3 $1 10 Component Parts No. Description Slide block No.

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VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

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10 0.3 MP 0.3 MPa 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MP 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200

SQ1000/2000

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

Electric Actuators

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

ZP

(0.3) Applicable pad B10MT/B15MT Applicable pad B20MT/B25MT/B30MT 30 31 R R 4 4 2 2 R R 4 6 10 6 Note) R part has to be smooth with no corners.

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20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room