Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end male thread CQS CQM Rod end nut CQ2 Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ Adjustment bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

: (800) 258-9200-www.stevenengineering.com Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63

Classification of Waterproof: Open Style (Non Water Proof), Pressure Range: 0.1~1.0MPa, Fluid Contact Area Material: Brass, Phosphorus Bronze, Thread: R(PT), Differential Scale Plate: None, Electric Wire Gland: A Type 20b, Contacts: -

Classification of Waterproof: 2 (Drip Proof), Pressure Range: 2 (0.05~0.7MPa), Fluid Contact Area Material: 1 (SUS316), Thread: R(PT), Differential Scale Plate: 1 (Differential Scale), Electric Wire Gland: B (A Type 20b)

0.02Stainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.02Stainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.014Brass, Phosphor bronzeNone(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.006Stainless steel 316Yes(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

2 kPaStainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.006Stainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.006Stainless steel 316Yes(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?

0.014Stainless steel 316None(Open type) Grommet(Dripproof) JIS F 8801Cable gland Type A20a 20b ?20c ?