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Note 14) For an actuator with lock, add the power consumption for the lock.

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Note 4) Based on dynamic performance test, JIS B 8375-1981. (0.5 MPa, Coil temperature: 20C, at rated voltage, without surge voltage suppressor) Note 5) For VFR400-FZ, ( ): VFR410DZ, < >: VFR440-GVFR410 VFR411 VFR414 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3.2 14 0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4

Dimensions 2 x 5 machined for bar ring Mounting hole 4 x M3 x 0.5 5 1010 55 55 1.2 Alphabetical Index Length Measuring/ Counter 6 (3.7) 67.4 59 55 65 CH IN OUT (3) 33.5 139 8 40 158 41.2 (2) 55 55 2 x 8 6 x 4 16 14 16 16 14 16 14 10 25 25 597 Series PCW 16 Point Output Reduced Common Unit Specifications Model Output PCW-993195 Weight 80 g Refer to page 43 in CAT.E02-20 about the circuit

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

. 14-9 14.3.4 Checksum . 14-9 14.3.5 Time-out processing . 14-9 14.3.6 Retry processing . 14-10 14.3.7 Initialization . 14-10 14.3.8 Communication procedure example . 14-11 14.4 Command and data No. list . 14-12 14.4.1 Reading command . 14-12 14.4.2 Writing commands . 14-18 14.5 Detailed explanations of commands . 14-20 14.5.1 Data processing . 14-20 14.5.2 Status display mode . 14-21 14.5.3

If the voltage drop (maximum of 5.2 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. 13 13 14. APPLICATION OF FUNCTIONS 14. APPLICATION OF FUNCTIONS .2 14.1 Infinite feed function (setting degree) .2 14 1 14. APPLICATION OF FUNCTIONS 14.

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 2 H1 A L1 Connection

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision. 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

P16 S1 S1 S1 S1 S2 S2 S2 S2 ... ... ... ... S32 S32 S32 S32 0.5mm) 1 2 2. 3.

Max. points Note) 16 16 16 Note) 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring. (Pitch) Negative Common Specifications Specify the valve model no. as shown below for negative COM specification. The standard manifold no. can be used. Please contact SMC for negative COM S kit.

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision, 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

LECSA1: Single phase 100 to 120 VAC, 50/60 Hz LECSA2: Single phase 200 to 230 VAC, 50/60 Hz Main circuit power supply L2 L2 P Terminal to connect regeneration option LECSAm-S1: No need for connection LECSAm-S3, S4: Connected at time of shipping. If regeneration option is required for Model Selection, connect to this terminal.