ZL3-OM00801

3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2),

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

Size: 3/4, Thread: G, Port Size: 3/4, Accessory: None, Option 1: Metal Bowl w/Level Gauge, Option 2: -

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Thermo-chiller

Fixing bolt (M8) (8 pcs.) Adjuster foot Unfixed caster (Caster O.D.: 2.9 inch [75mm]) Fig. 2 Caster adjuster-foot bracket (2 pcs.) Fixing bolt (M8) 4.6 [118] A B Fig. 3 Fixing bolt (8 pcs.) Fig. 1 Mounting view 19 Optional Accessories Series HRS100/150 e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating uid.

HRS100/150

Note 8) To be prepared by user. A specified earth leakage breaker is installed for option B [With earth leakage breaker] and B1 [With earth leakage breaker with handle].

rep-modular-e

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Lightweight and Compact

Automatic fluid fill port Rc3/8 R NPT3/8 or G3/8 Overflow port Rc3/4 R NPT3/4 or G3/4 The conversion fittings for circulating fluid outlet/return port, drain port, facility water inlet/outlet (for water-cooled refrigeration) are also included. HED 2 pcs./set HEA IDH Part no.

HRX-OM-Z002

Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 QUALITY CONTROL OF CIRCULATING FLUID AND FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during winter season . 8-6 8.3 CONSUMABLES . 8-6 8.4 OPERATION STOP FOR AN EXTENDED

Thermo-chiller

D-G

Table of Contents

/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65

5

Operating Range (mm) (mm) Auto switch model Bore size 20 25 32 40 D-M9l(V) D-M9lW(V) D-M9lA(V) 3.5 3 3.5 3 Auto switch model Bore size 20 25 32 40 D-B59W 12 12 13 13 D-H7l/H7lW D-G5NT/H7NF 4 4 4.5 5 D-A9l(V) 6 6 6 6 D-C7l/C80 D-C73C/C80C 7 8 8 8 D-H7C 7 8.5 9 10 D-G39A/K39A 8 9 9 9 D-B5l/B64 D-A3lA/A44A 8 8 9 9 * Values which include hysteresis are for guideline purposes only, they are not

Made to Order

D-A7 D-A80 D-A7 D-A80 D-A73C D-A80C D-F7NT D-J79C D-A79W Bore size (mm) A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 8 (5.5) 7 (4.5) 13 (10.5) 12 (9.5) 5 (2.5) 4 (1.5) 7.5 (5) 6.5 (4) 23.5 26 29 22.5 29.5 25 8 (5.5) 7 (4.5) 13 (10.5) 12 (9.5) 5 (2.5) 4 (1.5) 7.5 (5) 6.5 (4) 26.5 29 32 25.5 32.5 28 9 (6.5) 8 (5.5) 14 (11.5) 13 (10.5) 6 (3.5) 5 (2.5) 8.5 (6) 7.5 (5) 30 32.5 35.5 29 35 31.5

Air Cylinder Series CA2

110 130 140 120 D-F5NTL 25 + 55 (n 2) 2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) 130 + 55 (n 4) 2 (n = 4, 8, 12, 16) 140 + 55 (n 4) 2 (n = 4, 8, 12, 16) (n 4) 2 110 + 55 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) Different surfaces Same surface 15 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BAL D-G59F D-G5NTL 75 90 100 110 2 15 + 50 (n 2) 2 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 +

Table of Contents

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

C95

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 6-12-16 Series C95/C95K Auto Switch Mounting Position and Mounting Height [First angle projection] CJ1 CJP CJ2 CM2 Auto Switch Mounting Position CG1 D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) MB

C95

6, 8 6-12-25 26 Series C95N Auto Switch Mounting Position and Mounting Height [First angle projection] Hs A B Ht Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto Switch Mounting Position D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69

Air Cylinder

, 12, 16) (n = 4, 8, 12, 16) 15 90 100 110 120 1 2 (Different surfaces and same surface) 1 25 110 120 130 140 D-F5NT 25 + 55 (n 2) (n 4) 120 + 55 (n 4) 130 + 55 (n 4) 140 + 55 (n 4) 110 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) Different surfaces 15 D-B5D-G5D-G5D-K59W D-G5BA D-G59F D-G5NT