High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Battery-less

option S Dust-protected1 Cable Motor In-line motor type/D type Cable Table D Motor i Mounting2 o Actuator cable type/length Robotic cable [m] Nil None R8 83 R1 1.5 RA 103 R3 3 RB 153 R5 5 RC 203 Symbol Mounting R type L type D type Nil Without side holder V V H With side holder (4 pcs.)

ZP

R D A6 M Applicable tubing O.D.

Electric Actuator/Slider Type

Auto Switch Direct Mounting Style D-M9NW(V)/D-M9PW(V)/D-M9BW(V) RoHS Refer to SMC website for the details about products conforming to the international standards.

Rotary Actuator/Vane Type

The length is 24 when any of the following are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length is 30 when any of the following are used: D-97/93A The length is 25.5 when the D-M9 is used. *2.

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Table of Contents

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99 and D-S9P(V). The length is 30 when any of the following auto switches are used: D-97 and D-93A 2. The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97 and D-93A. The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V) and D-S9P(V).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

0.4

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

U D B C3, N1 C4, N3 C6, N7 (S, R, RS)(-D) P PG PH 1 2 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

4/5 Port Solenoid Valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V DC 14 MO2 USB D+ 10 V DC GND 1 LG Servo motor CN2 Encoder 7 8 MX MXR 3 MR 2 4 MRR LG PE M External encoder (Note 4) CN2L Encoder 7 8 MX2 MXR2 3 MR2 2 4 MRR2 LG Note 1.

EX120/121/122

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3E-GUMl V V V V V V V ZP3E-GBMl V V V V V V V r Flat type with groove r Bellows type with groove Note 1) G in the table indicates the pad diameter. Note 2) l in the table indicates the pad material. 472 A Component Part No.

Magnetically Coupled Rodless Cylinder

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V K dimension (Switch rail height) Bore size 6 3 6 11 16 20 26 28 5.5 5.5 5.5 6 6 7.5 6.5 1.5 1.5 1.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12 125 140 160 63 80 100 50 16 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5 5.5 6.5 5.5 5.5 CQM CQ2 11.5 11.5 11.5 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N