Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Compact Hydraulic Cylinder

How to Mount and Move the Auto Switch Auto switch mounting screw M2.5 x 0.45 x 4 l Watchmakers (precision) screwdriver Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Hexagon socket head set screw M4 r 1.

Air Cylinder

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CM3 v CJ2l-lA CG1 V v v v7 10-, 11CG3 v v v v v v v v v v v 25AJMB v v v v v v v v v XB6 MB MB1 v v v v v v v v XB7 CA2 v XB9 CS1 XB13 CS2 v v v v XC3 v v v v v v v XC8 v v v8 XC9 v v v v v v v v v XC10 v v v8 XC11 v v v v v v v v XC22 XC51 XC85 X446 X773 v v X2838 D-X Technical Data 45 A Air Cylinder

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Compact Cylinder

model 9.5 8.5 11 10 10.5 12 16 20 25 32 40 50 63 80 100 D-A9l(V) 7.5 9.5 9.5 9 9 D-M9l(V) D-M9lW(V) D-M9lA(V)L 5 5 5 3.5 5.5 5.5 6 6.5 7 7 D-A7l(H)(C) D-A80l(H)(C) 10 12 12 12 12 11 10 12 12 13 D-A79W 13 13 13 13 13 14 14 16 15 17 D-F7l(V) D-J79(C) D-F7lW(V) D-F7BA(V)L D-F7NTL D-F79F 5.5 6 5.5 5 6 6 6 6.5 6.5 7 D-P4DWL 5 5 5 5 5.5 Values which include hysteresis are for guideline purposes

Compact 5-Port Solenoid Valve

Nil V S V V R V Symbol P, E port JSY1000 JSY3000 JSY5000 C8 8 One-touch fitting V C10 10 One-touch fitting V C12 12 One-touch fitting V 00*1 Plug V V V *1 Can be selected when the pilot, silencer type symbol is Nil or S Not available for R type SUP/EXH block assembly (D side) accessories and the number of accessories * The 3/5(E) port is plugged for the built-in silencer type

&snac

&snac INSTRUCT ION MANUAL ( | D X o M B o 3 o ) I D G 3 , I I D G 3 M , I I D G 3 V , I I D G 5 , I r r ^ n r , I D G s M ' l I V I U U E . L I D G s V , I 7\cau t i on0 p e r a t i o n f M a k e s u r e t o o p e r a t e l { i t h i n s o e c i f i c a t i o n s . ( R e f e r t o p . ?

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-D) [ ]: AC When P, R port outlets are indicated on the D side, the P, R ports on the opposite side are plugged.

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Battery-less

option S Dust-protected1 Cable Motor In-line motor type/D type Cable Table D Motor i Mounting2 o Actuator cable type/length Robotic cable [m] Nil None R8 83 R1 1.5 RA 103 R3 3 RB 153 R5 5 RC 203 Symbol Mounting R type L type D type Nil Without side holder V V H With side holder (4 pcs.)

ZP

R D A6 M Applicable tubing O.D.

Electric Actuator/Slider Type

Auto Switch Direct Mounting Style D-M9NW(V)/D-M9PW(V)/D-M9BW(V) RoHS Refer to SMC website for the details about products conforming to the international standards.

Rotary Actuator/Vane Type

The length is 24 when any of the following are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length is 30 when any of the following are used: D-97/93A The length is 25.5 when the D-M9 is used. *2.

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Table of Contents

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99 and D-S9P(V). The length is 30 when any of the following auto switches are used: D-97 and D-93A 2. The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97 and D-93A. The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V) and D-S9P(V).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.