A

) H ZZ e f h l ZZ 40 51 146 43 11.2 59 1/4 stroke 154 50 58 459 52 11.2 66 1/4 stroke 167 63 58 179 52 11.2 66 1/4 stroke 178 Courtesy of Steven Engineering, Inc. !

ISO Standard Hydraulic Cylinder

flats G 4 x FD Rod side cushion valve D BB E FY V Head side flange air release MA Air release Head side cushion valve Air release FZ FX B C A K F NA NB H ZZ + Stroke S + Stroke Stroke range Bore size (mm) H K MA MM PJ A B BB C D E F FD FX FY FZ G GA GB J NA P S V Y Z ZZ NB 40 8 25 to 800 52 6.6 70 86 47 M6 x 1 19 M16 x 1.5 46 58 6.5 132 154 22 52 40 22 34 12 40 19 33 16 3/8 107 58 29 50 25

MY1

needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5

MY1

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

Profile Design ISO/VDMA Air Cylinder Series CP95

KK SW G BG I8 VD VA WA WB WH ZZ ZY E R I2 I9 32 22 30 12 G1/8 13 M6 6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

HRX-OM-X037

1 CH 2 return port return port sensor Particle Pump Particle filter filter Bypass Temp. valve Temp.

HRX-OM-W060

A Dimensions for the positions of the anchor bolts (View A) Fig. 8-3 Dimensions HRL Series 8.2 Dimensions 8-5 HRX-OM-W060 Chapter 8 Documents 8.3 Flow Diagram 8.3.1 HRL-A-20 Cirsulating fluid Cirsulating fluid outlet outlet CH 1 CH 2 Cirsulating fluid Cirsulating fluid Drain port Drain port sensor Particle filter Particle filter return port return port Bypass Temp. Temp.

HRX-OM-Y098

A Dimensions for the positions of the anchor bolts (View A) Fig. 8-3 Dimensions HRL Series Documents 8-5 HRX-OM-Y098 Chapter 8 Documents 8.3 Flow Diagram 8.3.1 HRL-A-20 fluid outlet Circulating fluid outlet Circulating Option D1 "CH1 with electrical conductivity control" Circulating fluid Circulating fluid Drain port Drain port CH 1 CH 2 return port return port sensor Particle Pump Particle

Series PF2W Digital Flow Switch For Water

OUT1 CH Unit display/Orange Illuminates the selected unit. Use after putting the unit label other than L/min, L. SET Channel display/Red Displays the selected channel. UP button ( button) Use to change the mode or to increase the set value. SET button Use this button to set the value or the set mode.

Fieldbus system Ethernet POWERLINK compatible SI unit

0 (Slot 0) RO 2004h 00h AMB, analog IN Ch 1 (Slot 0) RO 2005h 00h DMF, IN 0 7 (Slot 1) RO 2006h 00h DXF, IN 0 15 (Slot 2) RO : : : 2020h 00h RO Output data Index Sub Index Bit 15 8 Bit 7 0 Access 2065h 00h AMB, analog OUT Ch 2 (Slot 0) RW 2066h 00h AMB, analog OUT Ch 3 (Slot 0) RW 2067h 00h DMF, OUT 0 7 (Slot 1) RW 2068h 00h DYF, OUT 0 15 (Slot3) RW 2069h 00h SPL1-X26, OUT 0 15 (Slot4

AC Servo Motor Driver (Pulse input type/Positioning type)

Acceleration/de celeration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. 52 - 5.6.2 Motorspeed Configuration Motorspeed (r/min) configuration.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

EX500-GPR1A.eng

Specification Display Item P-ch MOS-FET ( open drain ) EX9-OET1 N-ch MOS-FET ( open drain ) EX9-OET2 Specification P-ch MOS-FET ( open drain ) EX9-OEP1 EX9-OEP2 2. EX9-PE1 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 Settings for display PWR PWR PWR Turns on: Power is supplied from external power supply.

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

Table of Contents

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!