7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specifications: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Series: 25A-ZSE20, Rated Pressure Range: CF (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter), Operation Manual

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration

2/3 Port Valve

G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is valued

Compact

3 3 m B 15 m* LER 5 5 m C 20 m* 2N LECP2* Programless type (With stroke study) *1 The standard cable should be used on fixed parts.

Pulse Valve

), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Fluoropolymer Piping Equipment

1/2" 3/8" 23 LQ1B35-M 8 5.5 9 29 LQ1B4B-M 3/8" 5.8 LQ1B36-M 6 3.6 LQ1B39-M 10 1/8" 18.4 29 21.9 4.4 4.4 LQ1B310-M 8 4.4 6 24 9 18 21 43 28 10 LQ1B4C-M 1/2" 1/2" 24.5 32 9 LQ1B4D-M 3/8" 5.8 LQ1B4G-M 1/2" 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1B41-M 12 3/8" 23 9.4 29 LQ1B5A-M 3/4" 1/2" 30.5 LQ1B42-M 10 7.4 10 10 38 6 24 9 18 21 43 28 10 LQ1B5B-M 1/2" 9 LQ1B43-M 12 1/2" 24.5 32 9.4 LQ1B5C-M

Rated Pressure Range: 20F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

AIR CYLINDER

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N