Steam Valve

M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

2/3 Port Valve for Various

VQ Electrical entry G C D T Body size 5 6 7 8 9 Grommet Conduit DIN terminal Conduit terminal 20A 25A 32A 40A 50A VX2 VX Refer to the table (2) given below for availability.

VQ4000

.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

HRX-OM-T002

/Japanese 1pc.), Accessory Y strainer (40 meshes) 25A, Barrel nipple 25A Anchor brackets 2pcs.

PF-OMN0009_C

SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(47) -11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

Thermo-chiller

(English), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs. (including 6 M8 bolts)8 Accessories Weight (dry state) kg 214 HRS200 Series 18-E700

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

/Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs. (including 6 M8 bolts) Note 10) Weight (dry state) kg Approx. 180 Approx. 215 Approx. 280 Note 1) When the ambient temperature or circulating uid temperature is 10C or below, refer to "Operation at low ambient temperature or low circulating uid temperature" (page 186-1).

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

/Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs. (including 4 M10 bolts) Note 10) Weight (dry state) kg Approx. 130 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating uid temperature is 10C or less. Note 2) Use uid in condition below as the circulating uid.

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

DOC1001322

, Barrel nipple 25A, Accessories Anchor bracket 2pcs.

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19