Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.2~1, Driving Type: Pilot

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 3/8, Pressure Rating(MPa): 0.2~1, Driving Type:

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0.2~

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: B (Bottom Ported), Port Size: 02 (1/4), Thread: T (NPTF)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: B (Bottom Ported), Port Size: 02 (1/4), Thread: N (NPT)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8), Thread: T (NPTF)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: B (Bottom Ported), Port Size: 02 (1/4)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4), Thread: N (NPT)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: B (Bottom Ported), Port Size: 03 (3/8), Thread: N (NPT)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8), Thread: N (NPT)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 02 (1/4), Thread: T (NPTF)

ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

Stations SYJ Seal Metal seal Rubber seal VVQ2000-10A-1 3 m VQ2200-51 Enclosure VQ2200-51 VQ2200-51 0 1 VQ2200-51 VQ2100-51 Nil SZ VQ2100-51 VQ2100-51 Dust-tight, Waterjet-proof (IP65) W Note) VF Type of actuation Note) T/L/S/M kit only.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread C B 10 55.5 32.5 23 20 93.5 42.5 51 30 103.5 52.5 40 139.5 62.5 77 50 149.5 72.5 10 13 21 D2 10 56 33 23 20 94 43 51 30 104 53 40 140 63 77 50 150 73 16 21.5 Construction p. 118 B5 04 06 N6 U6 Buffer Assembly p. 124 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 57.5 34.5 23 20 95.5 44.5 51 30 105.5 54.5 40 141.5

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !