5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ1501 Rubber seal 25 or less 33 or less Metal seal 22 or less 14.4 (0.8) 29 or less VQ2100 90 Single 2 position 3 position Rubber seal 24 or less 16.2 (0.9) 31 or less VQ2101 Metal seal 15 or less 14.4 (0.8) 20 or less VQ2200 Double Rubber seal 20 or less 16.2 (0.9) 26 or less VQ2201 Metal seal 29 or less 12.6 (0.7) VQ2300 38 or less VQ2000 Closed center Rubber seal 34 or less 14.4 (0.8) VQ2301

Actuation: 3 (3 Position Closed Center), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size), Thread: N (NPT)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.2 to 0.7, Driving Type: Pilot Type

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/4, Pressure Rating(MPa): 1, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPT, Port Size: 1/4, Pressure Rating(MPa): 1, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/4, Pressure Rating(MPa): 1, Driving Type: Pilot Type Spool, Pilot

Actuation: 3 (3 Position Closed Center), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: None, Thread: Rc (or NIL in the Case of No Sub-plate), CE Compliant: Q (CE Compliant)

Actuation: 3 (3 Position Closed Center), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size)

Actuation: 3 (3 Position Closed Center), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size), Thread: T (NPTF)

Series: VQ2000, Actuation: 3 Position Closed Center, Body: -, Seal Type: Rubber Seal, Function: VQ2: Standard, 0.4 W; VQ5: Standard, 0.95 W), Coil Voltage: 24VDC, Electrical Entry: None, Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Type, Tool Required), Enclosure: Dust-tight/Water-jet-proof Type, IP65, Porting: Side Ported, Port Size: Rc1/4, CE Compliant: -

Series: 2 (VQ2000), Actuation: 3 (3 Position Closed Center), Body: 0, Seal Type: 1 (Rubber Seal), Function: VQ2: Standard, 0.4 W; VQ5: Standard, 0.95 W), Coil Voltage: 5 (24VDC), Electrical Entry: None, Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Type, Tool Required), Enclosure: W (Dust-tight/Water-jet-proof Type, IP65), Porting: Side Ported, Port Size: 02 (Rc1/4)

ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread C B 10 55.5 32.5 23 20 93.5 42.5 51 30 103.5 52.5 40 139.5 62.5 77 50 149.5 72.5 10 13 21 D2 10 56 33 23 20 94 43 51 30 104 53 40 140 63 77 50 150 73 16 21.5 Construction p. 118 B5 04 06 N6 U6 Buffer Assembly p. 124 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 57.5 34.5 23 20 95.5 44.5 51 30 105.5 54.5 40 141.5

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Table of Contents

Straight union Bulkhead connector K P. 49 KFH P. 51 KFE Use to connect male thead and tube through a panel. Use to connect tubes in the same direction. M H D Male elbow Bulkhead union P. 49 KFL P. 51 KFE Use to pipe at right angles to female thread. Most general type. MS Use to connect tubes through a panel.

Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.