Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size), Thread: N (NPT)

Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: None, Thread: Rc (or NIL in the Case of No Sub-plate), CE Compliant: Q (CE Compliant)

Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size), Thread: T (NPTF)

Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size)

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv

Actuation: 1, Seal: 1, Coil Voltage: 5, Enclosure: Dust-tight/Water-jet-proof Type, IP65, Sub-plate: 02

Series: 2 (VQ2000), Actuation: 1 (2 Position Single), Body: 0, Seal Type: 1 (Rubber Seal), Function: VQ2: Standard, 0.4 W; VQ5: Standard, 0.95 W), Coil Voltage: 5 (24VDC), Electrical Entry: None, Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Type, Tool Required), Enclosure: W (Dust-tight/Water-jet-proof Type, IP65), Porting: Side Ported, Port Size: 02 (Rc1/4)

ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread C B 10 55.5 32.5 23 20 93.5 42.5 51 30 103.5 52.5 40 139.5 62.5 77 50 149.5 72.5 10 13 21 D2 10 56 33 23 20 94 43 51 30 104 53 40 140 63 77 50 150 73 16 21.5 Construction p. 118 B5 04 06 N6 U6 Buffer Assembly p. 124 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 57.5 34.5 23 20 95.5 44.5 51 30 105.5 54.5 40 141.5

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Table of Contents

Straight union Bulkhead connector K P. 49 KFH P. 51 KFE Use to connect male thead and tube through a panel. Use to connect tubes in the same direction. M H D Male elbow Bulkhead union P. 49 KFL P. 51 KFE Use to pipe at right angles to female thread. Most general type. MS Use to connect tubes through a panel.

Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Gasket 7 is supplied as an accessory.) 1 Manifold block assembly (Metric size) SX3000-51-2A (Inch size) SX5000-51-16A SX5000-52-2A(-Q) (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A SX3000-52-2A(-Q) Metric size SY3000: P, R port with one-touch fitting for 8 SY5000: P, R port with one-touch fitting for 10 Inch size With one-touch fitting for With one-touch fitting for 2 SUP/EXH block

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

A

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

Made to Order

to 99 stroke 49 stroke or less 51 to 99 stroke Bore size (mm) Applicable stroke range(mm) 49 stroke or less 51 to 99 stroke 49 stroke or less 51 to 99 stroke A B A B 121 132.5 80 100 136 147.5 111 120.5 116 125.5 6 to 99 113.5 125 80 100 136 147.5 103.5 113 116 125.5 6 to 99 1734 Made to Order Common Specifications: Intermediate Stroke Symbol -XB10 Dimensions: CQS Series Double acting, Single