5 Port Solenoid Valve, Series VQC

S Kit can be used by connecting to gateway unit.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic uid ll function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled refrigeration

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

A specied earth leakage breaker is installed for option B [With earth leakage breaker], B1 [With earth leakage breaker with handle] and S [Conforming to CE/UL standards]. Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 186) Item 13 * For altitude of 1000 m or higher.

VND

G (Valve open) Pilot port Indicator (Option) (Back side P2) Bracket (Option) Main port Main port Rc A B C D E F G M N P Q R S T U Model 3 8 1 2 3 4 1 VND20D-10A VND20D-15A VND30D-20A VND40D-25A 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 80 90 50 60 35 40 17.5 20 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 17-4-40 5 Series VND Steam Valve: 2 Port Valve

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

VP4

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

SFOD-OMT0009CN

CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M (2) (1) 56 No.SFOD-OMT0009CN-B 8.2 /0 () /() M INP ) 4 100mm/s 50mm No.1 50mm/s 50mm 10mm 5 100mm

Steam Valve

) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

7

Stainless steel With surge voltage suppressor H 100 VAC 6 25A N.C. N P C37 J 110 VAC Stainless steel 25 1 D N.O. K 200 VAC 7 32A N.C. Q CAC408 35 32A Flange L 230 VAC E N.O. Conduit terminal M 24 VDC With surge voltage suppressor 8 40A N.C. R CAC408 40 40A Flange N 100 VAC F N.O. P 110 VAC 9 50A N.C. S CAC408 50 50A Flange Q 200 VAC G N.O.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Air Slide Table

L3: Can be used within the Allowable overhang range in the selection graph if the load mass and driving speed values are within the allowable range For Transfer/ Without Adjuster MXQ 25A-mZm, MXQ 25-mZm Height interchangeable type Double-ported type MXQA MXQ20(A)-10, 20, 30, 40Z MXQ20(A)-50Z 7 7 V = mm/s V = mm/s 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 V = 100 V = 100 3 3 Low thrust

Battery-less

A + Stroke CL + Stroke 72 Battery-less Absolute (Step Motor 24 VDC) Guide Rod Type LEYG Series Model Selection Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Bearing Sliding bearing Graphs q, w Graphs t, y*1 Ball bushing bearing Graphs e, r Graphs u, i Graphs o, !

New

C37 25A 1 25 F 24 VDC Stainless steel G DIN terminal 24 VDC With surge voltage suppressor H 100 VAC J 110 VAC K 200 VAC L 230 VAC M Conduit terminal 24 VDC With surge voltage suppressor N 100 VAC P 110 VAC Q 200 VAC R 230 VAC S Conduit 24 VDC With surge voltage suppressor T 100 VAC U 110 VAC V 200 VAC W 230 VAC Faston terminal Y 24 VDC Z Other voltages For other special options, refer to

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55