Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Fluoropolymer Piping Equipment

E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.

Pulse Valve

P Port size L M (F) (E) (B) J K (C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specifications: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Compact

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 (mm) Dimensions D-M9W D-M9WV 500 (1000) (3000) (5000) Mounting screw M2.5 x 4 L Indicator light Mounting screw M2.5 x 4 L Slotted set screw (flat point) Slotted set screw Indicator light 3.95 0.3 7.5 2 2.8 2.6 15.9 22.8 4.6 2.8 19.5 2.6 2.6 2.6 9.5 4 Most sensitive

Coolant Valve

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (Z) U N (G) NN (mm) A B C D E F G H I J L Y M N NN P Q QQ R U V X Model 2-3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

VNC

10-5 to 160 x 10-5 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) Fluid speed (m/s) Conditions: Piping length/30 m Steel tube, full pressure/0.5 MPa 17-4-21 2 Series VNC How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) Nil B Nil F N T A B Rc G NPT NPTF None With bracket (VN-16) is valve size NBR seals FKM seals Note 1) Valve size 1 comes with VN1A16 (with thread).

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Rc1/8, Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C01 (Rc1/8), Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)