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6 7 8 VXFA2 B<t t r w r w e e VXF26C<t y t w w r r e q e q VXF26D<t t y r w r w e q e q Component Parts Component Parts No.

Lightweight and Compact

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 74 C O N T E N T S HRS090 Series Standard Type HRS HRS

VXP21/22/23

steel, Brass FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Stainless steel, Brass, NBR Stainless steel, Brass, NBR Disk assembly Disk assembly r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A

VXD21/22/23

FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Diaphragm assembly Diaphragm assembly Stainless steel, Brass, NBR Stainless steel, Brass, NBR r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A to

HRX-OM-T002

/Japanese 1pc.), Accessory Y strainer (40 meshes) 25A, Barrel nipple 25A Anchor brackets 2pcs.

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

VQ4000

T unit Can be connected with PLC I/O card for serial transmission.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

T. Manufacturing Co., Ltd.

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

5-Port Solenoid Valve

02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 09 9 stations 02 2 stations Specified layout*2 (Up to 18 solenoids available) 04 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) t P, E port entry *1 y For type S, SUP/EXH block assembly with a built-in silencer, choose U or D for P, E port entry.

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

Plug-in/Plug Lead: Single Unit

No. of sta. occupied, 2 stations T unit Can be connected with PLC I/O card for serial transmission.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry Port size F kit Double wiring F kit Single wiring T kit Double wiring T kit Single wiring S kit Double wiring S kit Single wiring L0 kit : Stations (1 to 16) L1 kit : Stations (1 to 16) L2 kit : Stations (1 to 16) C kit (Plug lead type) 02 03 B C8 C10 C12 N7 N9 N11 F1 F2 T1 T2 S1 S2 L0 L1 L2 C Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 With One-touch fitting for 8 With One-touch

VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported U-side end plate assembly !2 U-side end plate assembly part no.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

Process Valve Series VNA

G) 5, 6, 7 (Except DL)(Only T)(Only T) 365 Process Valve: 2 Port Valve For Flow Control Series VNB [Option] * Electrical entry: D or DZ only.

2/3 Port Valve

Main port Rc(PT) Model E F G L M N P Q D U C T B S A H I J K R 3 8 1 2 3 4 1 VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 52 26 4.5 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 14 55 28 34 42 25 63 124 2.3 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 17.5 20 84 100 92 108 135.5 137 153 154 170 62 72 31 36 5.5 6.5 60.5 73 35 40 43 49 50 60 30 35 80 90 2.3 2.3 151.5 10A, 15A, 20A, 25A Port size Vacuum pilot

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Inclined operation Allowable Driving Force (Fn) (n = 1, 2, 3) W + WB Wv P Pv W + WB > Wv P > Pv Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined (For vertical operation, refer to page 8-15-38.)