VND

Material Bronze Note Clear coated q Description Cover assembly Body Aluminum alloy Brass Platinum silver painted PTFE, EPR, FKM w e Plate assembly Valve element Piston assembly Return spring Second plate assembly r Brass, PTFE t Aluminum alloy y Piano wire u Aluminum alloy Body option S is made of stainless steel. 17-4-42

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

5 Port Solenoid Valve, Series VQC

S Kit can be used by connecting to gateway unit.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Power Valve: Economy Valve Series VEX5

Then, screw in q from the top of the housing w to tighten it. Note ) Tighten within the tightening torque of 0.5 Nm 20%. Changing the entry direction The orientation of a connector can be changed 180, depending on the combination of a housing w and a terminal block e. 1.

VP4

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

SFOD-OMT0009CN

1 100mm2 100mm No.1 50mm/s 1 100mm 2 50mm No.2 Step No. mm/s / 1 2 2 2 mm mm/s mm/s mm mm mm 1 LIN-A 100 100.00 1000 1000 0 0 0.5 2 LIN-A 100.00 0 0 0.5 1 3 4 1 LIN-I 50 100.00 1000 1000 0 0 0.5 2 LIN-I 50.00 0 0 0.5 2 3 4 () 2 50mm 2 25mm/s 50mm/s Step2 Step1 100mm 2 71mm/s 100mm 2 43mm/s 100mm/s 100mm 2 71mm/s (0, 0) 1 65 No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (

Steam Valve

) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5

Series: 25A-ISE20, Rated Pressure Range: CH (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

ZISE20C.eng

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

ZISE20C-L.eng

Bracket C Units specification Pressure range Default setting ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa Hysteresis ISE20C(H) MPa Self tapping screws: Nominal size 3 x 8L "Nil" or M Self tapping screws: Nominal size 3 x 10L ZSE20C(F) kPa Delay time 0.00 sec.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Air Slide Table

L3: Can be used within the Allowable overhang range in the selection graph if the load mass and driving speed values are within the allowable range For Transfer/ Without Adjuster MXQ 25A-mZm, MXQ 25-mZm Height interchangeable type Double-ported type MXQA MXQ20(A)-10, 20, 30, 40Z MXQ20(A)-50Z 7 7 V = mm/s V = mm/s 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 V = 100 V = 100 3 3 Low thrust

Battery-less

Lead 6: LEFS25EB 25 15 Lead 12: LEFS25EA Work load: W [kg] Work load: W [kg] 20 10 15 Lead 12: LEFS25EA 10 Lead 20: LEFS25EH 5 Lead 20: LEFS25EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32EB Lead 8: LEFS32EB 40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEFS32EA 30 Lead 16

New

C37 25A 1 25 F 24 VDC Stainless steel N.O.