Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 50mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -, Thread Port: -

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -, Thread Port: -

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 30mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 40mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 50mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Specification: 10 (Clean Series, Relief Type), Bearing Type: M (Slide Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port thread

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port thread

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note 1) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 60 Note) 20 to 60 NBR (FKM) Note 2) 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note 1) VXD23 to 26 (8A to 25A) VXD27

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure(

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure(

Bore Size: 6mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 20mm

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

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COM. () 20 COM.

Dual rod cylinder with slide bearing, Bore sizes: 6, 10, 15, 20, 25, 32 *, Strokes from 10mm through 100mm depending upon bore size, Variety of switches and a variety of lead wire lengths GUIDED CYLINDER. Cylinder, Air. 0.16800 lb. 571.