Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Bag Filter

Pressure gauge Note 1) FGF 1 X49 B 20 Z 003 1 element included (For precision filtration) 3/5 elements included (Produced upon receipt of order.) Z X49 FGF 003 Option Note 1) Note 1) Without pressure gauge/Without option: is not required to enter. Example) FGFS1A-20-Z003B-X49, FGFS3B-40-Z003X49 Element/Element-Fixing Component Part No.

ChemicalThermo-con

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176 ChemicalThermo-con Series HED Main Specifications (For details, please consult our Product Specifications information.)

Return Filter

Micro mesh element EM810 Hydraulic fluid type (See Table 6-3) Table 6-4 Nominal filtration Symbol Nominal filtration 003 3m 005 5m 010 10m 020 20m 040 40m Note) Refer to the Table 6-7 for the product number of the O-ring for the element. 074 74m 105 105m 149 149m 270 270m 15 / 17 FGX-OM-F001-A [2] Replacement Differential pressure indicator Table 6-5 5.

AC Servo Motor Driver (Pulse input type/Positioning type)

JOG operation Accelerationeration/D eceleration time constants (msec) PE07 100 1000 500 250 143 1000 500 250 Home position return position data (m) PE08 0 -4000 (<1000 stroke)/-400 (>1000 stroke) Stopper type home position return PE10 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000 (Non)/002 (LEC-MR-RB-032)/003

SMC Wireless System EtherNet/IP ® compatible

I/O Map Input data Output data Base Diagnostic information Remote Base (Wireless channel 001) Remote Remote (Wireless channel 002) (Wireless channel 001) Remote Remote (Wireless channel 003) (Wireless channel 002) System output size Remote (Wireless channel 003) System input size Remote (Wireless channel N) (Wireless channel N) Occupied points for the Remote module output Occupied points

SMC Wireless System PROFINET compatible

I/O Map Input data Output data Diagnostic information 1 Base Base Remote (Wireless channel 001) Remote (Wireless channel 001) Remote (Wireless channel 002) Remote (Wireless channel 002) Remote (Wireless channel 003) Remote (Wireless channel 003) System output size System input size Remote (Wireless channel N) Remote (Wireless channel N) Occupied points for the module output Occupied points

Tamper Proof and Flat Head Screw

SMC Pneumatics, Inc. 13 Tamper Proof Speed Controller Standard Type Series AS20-T Metal Elbow Type Specifications AS12 0-M5 AS12 0-U10/32 Specifications Model AS22 001 AS32 003 AS32 002 AS22 002 AS42 004 1/4 10-32UNF Port size M5 x 0.8 1/8 1/4 3/8 1/2 32, 40, 50, 63 80, 100 20, 25, 32, 40 6, 10, 16, 20, 25 Applicable cylinder bore size (mm) 1.5MPa (218psi) Proof pressure 1MPa (145psi) Maximum

2/3 Port Valve

Applicable valve model O 06 12V DC 55 100V DC 56 110V DC 002 VXZ22ll DC 07 240V AC 50/60Hz 003 VXZ23ll Note 1) The voltage codes of 01 to 08 when the suffix "0" is removed, are the same as the solenoid valve model codes.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Noryl, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Noryl, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.

Specifications Accuracy: Orifice Size ±.003”, Material: FDA Approved Noryl, Max Operating Pressure: 100 PSI, Connection: Straight Connection for 1/16" I.D.