1

cylinder Mechanically Jointed Rodless Cylinder with Brake: Series ML1 z -X416/-X417 Holder mounting bracket I, II Sine Rodless Cylinder: Series REA, REB z -X168 Helical insert thread specifications -21-112 x -X206 Additional moving element mounting taps -21-112 c -X210 Non-lubricated exterior specifications -21-112 v -X324 Non-lubricated exterior specifications with dust seal -21-113

AC Servo Motor Driver (Pulse input type/Positioning type ）

The Z-phase signal was Review the Z-phase unpassed not detected normally. signal and wirings. not detected.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) Z: Positive common specifications only.

AC Servo Motor Driver (Network card type ）

The Z-phase signal was Review the Z-phase unpassed not detected normally. signal and wirings. not detected.

V100

VVZ400-32A-21 pc.

Compact 5-Port Solenoid Valve

With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)

Air Cylinder

13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) (Effective thread length 2 x FL) MM 2 x LC LZ LX D D I 20, 25 Width across flats KA Standard port Width across flats NA MM Relief port (10-, 21-) Vacuum port (11-, 22-) 45 45 Width across flats B2 LT 4 x LD Y ZZ + 2 x Stroke LS + Stroke S + Stroke X Z + Stroke Z X Y 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P I F A 12 10 8 6 KA MM NA NN B1 B2 G 4 4 4 4

Hydraulic

Z (Example) C73CZ None .

CA2

to 600 up to 750 up to 750 B H1 C J D E F G H K S S KA L MM N P RR U A AL B1 CX Z 165 183 196 235 256 ZZ 175 195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 M8 x 1.25 8 11 11 13 16 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48

5

27 64 20 40 10 17 58 11 M10 x 1.25 7 18 M18 x 1.5 31 3/8 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Bore size (mm) S TDe8 TT TX TY TZ Z ZZ 40 84 150.032 0.059 22 85 62 117 93 140 50 90 150.032 0.059 22 95 74 127 103 154 63 98 180.032 0.059 28 110 90 148 107 162 80 116 250.040 0.073 34 140

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) Z: Positive common specifications only.

Air Cylinder Series CA2

52 14 21 M12 x 1.75 10 M26 x 1.5 40 1/2 126 (Both sides) TDe8 Without rod boot With rod boot (Single side) TX Bore size (mm) TY TZ TT H Z ZZ d e f h Z ZZ Z ZZ l -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.040 -0.073 40 50 63 80 100 22 85 62 117 51 93 186 56 43 11.2 59 1/4 stroke 101 194 101 202 15 22 95 74 127 58 103 206 64 52 11.2 66 1/4 stroke 111 214 111 222 15 28 110 90

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Table of Contents

to Z kgm2 IB m1 m2 r1 r2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of

Combination Cylinder

21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA L MM N P RR S U W H 51 58 58 71 72 110 110 120 Z 234 261 280 327 356 ZZ 244 273 296 347 381 e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133 133 141 Z 242 269 288 336

SYJ3000/5000/7000

Power saving circuit is only available in the "Z" type.

Dual Rod Cylinder Series CXSJ/CXS

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

Table of Contents

[31] 34 161.5 [165.5] 189.5 [187.5] VQ7 G 1/2 EVS Light/Surge voltage suppressor VFN (For FZ) 120.5 [129.5] 110 [119] 134 [143] (For FZ) 21 [25] 23 [25] 46 [55] 5 1 3 31 [39] 31 [39] 5-Rc 3/8, 1/2, 3/4 56 [60] (Piping port) [ ] = Rc 3/4 2 position double: VFR520 -F(Z) 3 position closed center: VFR530 -F(Z) 3 position exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0

Table of Contents

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.