ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size Foot bracket Description Mounting screws included in foot bracket 50 CRA1L50 -Y-1Z M8 1.2535 Foot bracket 2pcs. 63 CRA1L63 -Y-1Z M10 1.540 Mounting thread4pcs. 80 CRA1L80 -Y-1Z M121.7550 Collar 4pcs. M121.7550 100 CRA1L100-Y-1Z After the foot bracket removed the mounting screws of the basic style, mount to the cover with the mounting screws included in foot bracket.

Size: 30, Backflow Function: None, Thread: N (NPT), Port Size: 03 (3/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 1 2000r/min5s 150r/min 100 10% 2 (2) 2 21 (No.PB06) 2 No.

REGULATOR

7 AR40K-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50K-B 70 66 65.8 11 13 90 3.2 AR60K-B 70 66 65.8 11 13 90 3.2 Note 1) B dimension is a size in the state to unlock the handle.

FILTER REGULATOR

AW20-B 11 AW20-B 0.80.1Nm AW30-B 17 AW30-B 2.350.3Nm AW40-B 21 AW40-B 3.50.3Nm Disassembly Remove the bowl assembly, housing, and element. Hexagon Remove a housing from a body by turning 4 mounting screws to the left with a hexagon wrench key. wrench key Nominal5 Remove the valve guide.

FILTER REGULATOR

Hexagon wrench Tightening torque key Nominal5 4.51.0N 21 ) Bracket assembly, panel mount Applicable model Process Procedure Tools Check items Assembly Mount the parts to the bracket (panel) Mate the bracket(panel) concave and the bonnet convex to mount the bracket. Settle the bracket (panel) with set nut.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 40, Backflow Function: Backflow Function, Thread: NPT, Port Size: 3/8, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1Z (1+Z)

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: 1Z (1+Z)

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3