Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Hydraulic

(same side) n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 Different sides 120 90 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Cylinder with Lock

, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 115 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 75 80 95 105 110 D-A5m D-A6m n 75 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 +

CATALOG

20 ~ 1000 32 35 70 52 20 40 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 1000 20 ~ 1000 32 35 85 64 20 40 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 1000 20 ~ 1000 37 40 102 78 25 52 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 1000 20 ~ 1000 37 40 116 92 30 52 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 Without gaiter With gaiter Bore Size (mm) FV FD FT FX FY FZ

Slider Type Ball Screw Drive/11-LEFS Series

kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600

Integrated Controller

to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Up to 1000 Up to 1000 Up to 1000 Up to 1000 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 5.5 6.6 9 9 9 12 14 44 48 60 74 78 100 120 Rear flange style: (G) 4-FD B FY FT FZ FX ZZ + Stroke (mm) Stroke range Bore size (mm) FT FD B FX FY FZ ZZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 8 8 12 12 16

LEC-OM071xx

Time Constant 1 Compensation Pn164 0.01 ms 0 Immediately Tuning 1000 -1000 to 2 Anti-Resonance Filter Time Constant 2 Compensation Pn165 0.01 ms 0 Immediately Tuning 1000 2 Tuning-less Function Related Switch 0 to 2411 1401 Pn170 Pn205 2 Multiturn Limit Setting 0 to 65535 1 rev 65535 After restart Setup 4.7.5 10-12 10 List of Parameters (contd) Parameter Name Setting Units Factory

Programless controller Step motor (servo 24 VDC)

7 40 700 40 700 8 50 800 50 800 9 60 900 60 900 10 70 1000 70 1000 11 80 1200 80 1200 12 90 1400 90 1400 13 100 1600 100 1600 14 110 1800 110 1800 15 120 2000 120 2000 58 No.

MB

Rod side Flange Rod side flange: (F) Bore size (mm) Stroke range B FD FE FT FX FY FZ Fd 32 40 50 63 80 100 125 to 1400 79 90 110 120 153 178 216 57.5 32 36 45 50 63 75 102 64 72 90 100 126 150 180 7 9 9 9 12 14 14 7 20 to 700 to 800 to 1000 to 1000 to 1000 to 1000 50 55 70 80 100 120 138 3 3 2 2 4 4 10 10 12 12 16 16 25 31 38.5 39.5 45.5 54 Port Cushion valve 4-FD Fd FY B CJ1 Without Air

SFOD-OMT0009CN

17 9 () 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20 12 6 [mm] 500 500 500 600 700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108

SFOD-OMT0010

Axis 3 ABS 50 50.00 1000 1000 0 0 0 0.5 Axis 4 ABS 50 50.00 1000 1000 0 0 0 0.5 Movement (ex.)

Metal Seal/Rubber Seal Series VQ Body Ported

Characteristics 65 or less Cable length (L) 9 stations{ Conductor resistance /km, 20C 10 stations{ 11 stations{ 1.5 m AXT100-DS25-015 Cable 25 core x 24AWG 3 m AXT100-DS25-030 Voltage limit V, 1 min, AC SOL.A SOL.B 1000 5 m AXT100-DS25-050 12 stations{ SOL.B COM. Connector terminal no.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22

JXCx-OMU0004

1000 1000 [mm/s [mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6 30%F.S.LEP10 25%F.S.

LJ1H

1000 400 L3 (mm) a = 2000 LEC-MR-RB-12 LEC-MR-RB-12 LEC-MR-RB-12 LEC-MR-RB-12 A1 A2 B1 B2 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 45 for deflection data.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

size (mm) B FT FD FX FY FZ MGZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 Up to 1000 Up to 1000 Up to 1000 MGT Head flange style: (G) 4 x FD B FY ZZ + Stroke FT FX FZ D(mm) -X Stroke range Bore size (mm) B FT FD FX FY FZ ZZ Individual -X 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 220 244 270 Up to 1000 Up to 1000 Up to 1000 437 Double Power