Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.

HRL

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.

76

(per 1 m3 ) The amount of moisture at the intersection C the amount of moisture at the intersection H = the amount of condensed water 18.2 3.0 15.2 g/m3 11 Series IDF100FS/125FS/150FS Specific Product Precautions 1 Be sure to read before handling. Refer to page 14 for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Air Preparation Equipment Precautions.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF1D-1 AM150-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11

CATALOG

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

PF2A/PF2W

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Phillips /Ordinary Round Head Screw Gasket Series SY3000-23-4 (M2x21) SY3000-11-8 SY3000 M3x26 (Non Glare Nickel Plating) SY5000-11-2 SY5000 M4 x 31 (Non Glare Nickel Plating) SY7000-11-2 SY7000

Table of Contents

Wire Color by Terminal No. of D-sub Connector Cable Assembly Wiring Specifications Dot marking Lead wire color Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink None None None None None None None White Black Black Red Red Red Black Black AXT100-DS151 to 3 Multi-core vinyl cable VVRF 0.3 mm2 x 15C 9 Plug

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !3 o i q w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Material Note No. Description No.

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ6(L)Without adjusterGrade 3 (Class 100 or equivalent)1