Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

1

type CJ2K Double acting, Single rod XA0, 1, 10, 11 *1 Single acting (Spring return/extend) XA0, 1, 10, 11 *1 Built-in speed controller type CJ2Z Double acting, Single rod XA0, 1, 10, 11 *1 CJ2ZW Double acting, Double rod XA0, 1, 10, 11 *1 CJ2-Z Direct mount type CJ2RA Double acting, Single rod XA0, 1, 10, 11 *2 Single acting (Spring return/extend) XA0, 1, 10, 11 *2 Direct mount, Non-rotating

Table of Contents

62.5 74.5 92.5 112.5 CA 9.5 10.5 11.5 13 14 K 9 9 10 11 12 NB Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D I +0.025 0 0 0.036 0 0.036 0 0.036 0 0.043 0 0.043 6 7 9 11 12 2H9 3H9 4H9 6H9 8H9 8H9 8H9 +0.025 0 +0.030 0 10H9 +0.030 0 +0.036 0 12h9 14h9 WA SA 4.2 4.2 5.1 6.6 6.6 R 44 52 63 78 98 ZC 9 9 10 12 15 SB 8 8 9.5 11 11 ZB 7.4 11.4 13.4 17.4 21.4 TB 8 8 10 10 12 YB 8 8 10 12

High Vacuum Angle Valve

-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil None w, e w e A B C Seal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Aluminum High Vacuum Angle Valve

-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil None w, e w e A B C Seal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Table of Contents

For detailed selection procedures, refer to pages 8-11-92 and 8-11-93. 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-90 8-11-91 87 Series MY1HT Model Selection Following are the steps for selecting the most suitable Series MY1 to your application. Calculation of Guide Load Factor 1.

Free Mount Cylinder

6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 M3 x 0.5 depth 5 7 10 11 12 15.5 19.5 12.5 14 18 22 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 M3 x 0.5 depth 5 M4 x 0.7 depth 6 4 9 9 13.5 2 4.5 4.5 4.5

Table of Contents

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

ISO Cylinder

M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6

Smooth Cylinder/Low Speed Cylinder

7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time s Initial

MHZ

point L (mm) Gripping point L (mm) MHS MHZJ2-10D/11-MHZ2-10D External Grip MHZAJ2, MHZJ2, 11-MHZ2 MHC 20 Gripping force (N) Pressure 0.7 MPa Pressure 0.7 MPa MHT 15 0.6 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa 0.2 MPa 0.5 MPa MHY 10 0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

MHZ

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

5

7.5 2.5 10 7.5 4.5 10 7.5 25 6 3.5 1.5 [1] 6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

Electric Actuator/Slider Type

4 680 700 952 706 867 10 4 680 800 1052 806 967 12 5 850 900 1152 906 1067 14 6 1020 1000 1252 1006 1167 14 6 1020 1100 1352 1106 1267 16 7 1190 1200 1452 1206 1367 16 7 1190 1300 1552 1306 1467 18 8 1360 1400 1652 1406 1567 20 9 1530 1500 1752 1506 1667 20 9 1530 1600 1852 1606 1767 22 10 1700 1700 1952 1706 1867 22 10 1700 1800 2052 1806 1967 24 11 1870 1900 2152 1906 2067 24 11 1870 2000