Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Table of Contents

100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9 2-M3 x 0.5 thread depth 4 (Mounting thread) 15 3H9 depth 3 +0.025

Table of Contents

11 !2 !33 !4 !5 !

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

Micro Mechanical Valve Series VM1000

VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

KJ

11 !2 !33 !4 !5 !

Modular/F.R.L. Units Series AC

11 6.4 AG Part no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

VS 8-2/VS 8-4

49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801-R-03 (Size 26 mm) By mounting individual EXH spacers on a manifold block, it is possible to provide individual EXH ports for each valve. (3(R2), 5(R1) common EXH type) 22.5 11 Size 18 mm 1(P) 129.5 4(A) 61 2(B) 3(R') 19 26 13 3/8" 5(R1) 3(R2) Circuit diagram 28.6 14.3 Size 26 mm 23 Series VS 8-2/VS 8-4 S R S R Conforms to ISO

Plug-in Unit

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 24 11.

Smooth Cylinder/Low Speed Cylinder

108 92 80 9 9 74 56 M FV REC 80 134 116 99 11 11 83.5 63.5 FT L B + Stroke 4 x FD FX FZ CY CY 100 154 136 117 11 11 95 73 A + Stroke Bore size (mm) Stroke range (mm) CX L M L1 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 18 43.5 60 MQ 80 20 53.5 77 RHC L1 100 22 53.5 94 Head side flange style: CQ2YG/CDQ2YG RZQ Flange bracket material: Carbon steel Surface treatment: Nickel plated

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(M plug connector) 7.5 35.5 11 ~ = 3 3 position (Grommet) 3 position (L/M plug connector) Dimensions Formula L1 = 10.5n + 24, L2 = 10.5n + 44 n: Station (Maximum 16 stations) n L 1 16 15 192 212 237.5 248 14 181.5 201.5 225 235.5 13 171 191 212.5 223 12 160.5 180.5 200 210.5 11 150 170 200 210.5 10 139.5 159.5 187.5 198 9 129 149 175 185.5 8 118.5 138.5 162.5 173 7 108 128 150 160.5 6 97.5

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

VQC

Base Mounted 11 Series VQC1000 How to Order Valves VQC 1 1 0 5 0 Manual override Nil: Non-locking push type (Slotted) 1 VQC1000 Series Light/Surge voltage suppressor With Without Note) Nil E Type of actuation 2 position single 4 position dual 3 port valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) Not applicable to S kit. 1 A Note) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type

XL

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

VQ4000

) (12.5) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External

C76

0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet