CA2

Refer to pages 6-8-7 to 11. -X 20Data 6-8-25 26 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod Series CA2KW 40, 50, 63 How to Order Without auto switch L 40 200 CA2KW L 200 40 Y7BW Number of auto switches CDA2KW With auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

24

speed of 200 mm/s.

MGP

Vertical Mounting Slide Bearing MGPS50, 80 1 50mm stroke or less V = 200mm/s 2 Over 50mm stroke V = 200mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 10 50 100 200 10 50 100 200 10 Eccentric distance l (mm) Eccentric distance l (mm) 3 50mm stroke or less V = 400mm/s 4 Over 50mm stroke V = 400mm/s 300 300 200 200

AC Servo Motor Driver (CC-Link Type ）

4 11.

JXCx-OMU0004

9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100 3000 1400 3000 1500 3000 51 No.JXC-OMU0004-A LEFS LEFS16A LEFS16B LEFS25H LEFS25A LEFS25B 2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 10 200 5 200 20 200 12 200

AC Servo Motor Driver

(The motor full load current is 115 rated current.) 1000 1000 In operation In operation 100 100 Operation time [s] Operation time [s] In servo lock 10 10 In servo lock 1 1 0.1 100 200 300 350 0 0.1 100 200 300 350 0 (Note 2) Load ratio [ ] (Note 2) Load ratio [ ] LECSB-S5 LECSB-S7 LECSB2-S8 App. 12 APPENDIX (11) Figure configuration Representative configuration example to conform to the UL

High Vacuum Angle Valve

52 68 11 88 196 100 3 87 95 70 69 11 90 235 117 3 114 110 83 96 11 108 299 154 3 134 130 102 131 11 138 315 200 3 190 180 153 112 Note 1) Dimension E applies when heater option is included.

CM2

11 16 10 24 14 7 21 22 41 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 44.5 1/4 32 Dimensions by Stroke Boss-cut Style Built-in One-touch Fittings Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ ZZ S S ZZ Bore size (mm) 20 25 32 40 Bore size (mm) Bore size (mm) ZZ ZZ ZZ ZZ ZZ Q P 20 20 191 137 166

Table of Contents

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

MG

the speed of 200 mm/s.

CL

PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 24 29 35.5 44 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 5 6 6 8 11 11 10 10 to 200 to 300 to 300 to 300 11 11 11 12 141 151 154 169 35 40 40 50 38 41 41 41 178 193 196 30 30 35 35 20 24 24 24 19.5 24 24 24 55 62 62 70 33 38 39 44 0.25 198 215 218 241 16 17 17 17 Stroke 221 Refer to p.3.1-30 for long

CG1

230 ZZ 181 186 188 205 S 144 144 146 153 ZZ 156 161 163 180 S 119 119 121 128 ZZ 131 136 138 155 S 94 94 96 103 169 171 178 11 11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[Example] 10-SYJ3123-5M-M3 VJ3000-13-1 Rated voltage 5 port DC AC (50/60Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type "W", DC voltage is only available.

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Programless controller Step motor (servo 24 VDC)

250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY25A / LEYG25A LEY25B / LEYG25B LEY25C / LEYG25C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 18 200 9 200 5 200 1 24 300 12 300 7 300 2 36 400 18 400 9 400

Sine Rodless Cylinder Series REA/REB

cylinder shaft center Lo (cm) CY Distance from cylinder shaft center Lo (cm) 63 CX REA63 100 80 1000 REA50 MQ 50 40 30 REA40 500 400 RHC REA32 Load mass W (kg) 300 20 REA25 RZQ 200 10 100 Usable range 30 40 50 D-X 20 1 100 200 300 Individual -X 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Maximum speed U (mm/s) Distance from cylinder shaft center Lo (

CL

Piston speed over 200 mm/s (When locking) 4. Immediately before a lock stop, drop the piston speed to 200 mm/s or lower by switching the speed controller (to the bypass circuit).