Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

5-Port Solenoid Valve

Valve size Valve size 50 50 DOWN DOWN At 300 mm/s Can drive cylinders of Existing up to 50 2 Valve size Valve size 63 63 Existing DOWN DOWN (80 at 100 mm/s) Can drive cylinders of up to 63 2 80 (125 at 100 mm/s) Can drive cylinders of up to 80 2 (160 at 100 mm/s) 2 Values based on comparison with the existing SMC model For details, refer to page 13.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

Dual Rod Cylinder Series CXSJ/CXS

to 10 st 3 2 V = Up to 100 mm/s V = Up to 300 mm/s CXSM CXSL 0.1 1 Mass m (kg) 0.05 0.5 32 Mass m (kg) 25 CXSM6 CXSL6 0.1 0 0.01 20 20 40 60 80 100 0.05 Overhang l (mm) 15 Graph (8) Up to 30 st 10 0 0.01 V = Up to 100 mm/s V = Up to 300 mm/s 20 40 60 80 100 0.05 Overhang l (mm) Mass m (kg) Graph (11) V = Over 400 mm/s; Up to 10 st 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Overhang

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) TA TB TC S 94 94 96 103 ZZ 131 136 138 155 S 119 119 121 128 ZZ 156 161 163 180 S 144 144 146 153 ZZ 181 186 188 205 ZZ 211 213 230 20 25 32 40 11 11 11 12 11 11 10 10 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 169 171 178 Note) The drawing below shows the single acting/spring return style.

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AC Servo Motor Driver (CC-Link Type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 350 100 200 300 400 0 50 150 250 350 100 200 300 350 0 50 150 250 Load ratio [%] (Note 1, 2, 3) ) (Note 1, 2) Load ratio [%] LECSC2-T7, LECSC2-T8, LECSC2-T9 LECSC2-T5 Note1.

Combination Cylinder

17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA L MM N P RR S U W H 51 58 58 71 72 110 110 120 Z 234 261 280 327 356 ZZ 244 273 296 347 381 e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133 133 141 Z 242 269

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

AC Servo Motor Driver (CC-Link Type ）

When you carry out adhesion mounting of the driver, make circumference temperature into 0 to 45 (32 to 113 ), or use it at 75% or smaller effective load ratio. 1000 1000 During operation During operation 100 100 Operation time[s] Operation time[s] During servo lock During servo lock 10 10 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 (Note) Load ratio [%] (Note) Load ratio

15

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !

LEC-OM071xx

2 1 to 65535 10 reference units/s2 100 Pn80C Acceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn80D 1st Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80E 2nd Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80F Deceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn827 Linear Deceleration Constant

CL

119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P

Electric Actuator

T1 = V/a1 = 100/3000 = 0.033 [s], T3 = V/a2 = 100/3000 = 0.033 [s] T2 = = = 1.97 [s] L 0.5V(T1 + T3) V 200 0.5100(0.033 + 0.033) 100 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

LEC-OM07605CN

PA24 A-4] 3(_ _ _ 1) 0 1 2 0h _ x _ _ 0h x _ _ _ 0h PB03 TFBGN 6rad/s6rad/s 18000 0 [rad/s] 18000 PB04 FFC 100%0 100%1s 0 0 [%] 100 PB06 GD2 [Pr. PA08] 0.00100.00 7.00 [] 0.00 300.00 Pr. PA08 _ _ _ 0(21()) _ _ _ 1(1) _ _ _ 2(2) _ _ _ 3() _ _ _ 4(22) PB07 PG1 [Pr. PA08] 15.0 1.0 [rad/s] 2000.0 Pr.

Electric Actuator/Slider Type

Nil Without connector H With connector Compatible drivers Power supply voltage (V) Size 25 32 40 Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 Applicable stroke table Standard C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) H E F C D N M K J I Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 10.5 20 77 15 46 54 9 60 17 7 M10 x 1.5 103 14 depth 10.5 93 15 8 Rc 1/4 80 12.5 98 25 21 53.5 63.5 11 77 22 6 M16 x 2.0 132 17.5 depth 13.5 112.5 16 10 Rc 3/8 100 13 117 30 27 63 75 11

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.