NCG/CG1

26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 14 16.5 20 26 32 38 50 60 18 22 22 30 35 35 40 40 35 40 40 50 58 58 71 71 69(77) 69(77) 71(79) 78(87) 90(102) 90(102) 108(122) 108(122) 11 11 11 12 13 13 13 17 17 19 27 27 32 41 10(12) M4 x 0.7 depth 7 M8 x 1.25 Rc 1/8 106(114) 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W CS1 AL 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26 M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

Air Cylinder

11 M5 x 0.8 106 (114) 25 Up to 300 301 to 1500 22 19.5 17 16.5 11 14 2 12 10 (12) 40 6 31 M5 x 0.8 depth 7.5 10 M10 x 1.25 29 1/8 69 (77) 11 11 M6 x 0.75 111 (119) 32 Up to 300 301 to 1500 22 19.5 17 20 12 18 2 12 10 (12) 40 6 38 M5 x 0.8 depth 8 10 M10 x 1.25 35.5 1/8 71 (79) 11 10 (11) M8 x 1.0 113 (121) 40 Up to 300 301 to 1500 30 27 19 26 16 25 2 13 10 (13) 50 8 47 M6 x 1 depth 12 14

CG1

20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 With rod boot ZZ Bore (mm) Applicable pin part no.

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS40l-550l 906 955 556 728 10 4 600 11-LEFS40l-600l 956 1005 606 778 10 4 600 11-LEFS40l-650l 1006 1055 656 828 12 5 750 11-LEFS40l-700l 1056 1105 706 878 12 5 750 11-LEFS40l-750l 1106 1155 756 928 12 5 750 11-LEFS40l-800l 1156 1205 806 978 14 6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11

CL

35 35 40 40 50 50 56 6.5 6.0 6.0 8.0 8.0 43 43 43 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 27 32 32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32 40 40 52 52 22 27 27 32 41 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14

CRBU

X Y (mm) Size Y X 10 3 19 Body (B) 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 11-3-31

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

15

3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NY M3 x 0.5 5.5 45 30 5 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NX M4 x 0.7 7 46 30 3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 4.5 NM2 3.4 7 31 30 3.7 8.5 42 M2.5 x 10 1.0 M3 x 8 0.63 6 4.8 25 NZ M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12

CV/MVGQ

11 13 16 147 157 173 189 203 + 0.058 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 31.5 35.5 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 16 20 20 25 30 32 40 40 52 52 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 30 35 40 48 58 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5

CV/MVGQ

30 35 35 40 40 44 52 64 78 92 147 157 173 189 203 22 27 27 32 41 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

Free Mount Cylinder Series CU

20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction flow rate of vacuum suction type (Reference values) Specifications Size Suction flow rate l/min (ANR) 6 10 16/20/25 Bore size (mm) Item 6 10/16 20/25 6 10 12 1.05MPa 0.7MPa 0.12MPa

ZP

(7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) (8.5) 15 (8) 16 (17) (16) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections

Magnetically Coupled Rodless Cylinder

30 27 M4 x 0.7 11 10.5 24 40 10 56 68 3.5 20 60 16 85 17.5 68 8 M8 x 1.0 M4 x 0.7 30 60 12.5 0.5 1.0 77 103 4.3 26 80 20.5 PA dimensions are for split from center.

SY

Gasket Round head combination screw 7 8 SY9000-11-2 SY9000-18-2 (M3 x 42) SY5000-11-13 SY7000-11-7 SY3000-11-25 NBR For mounting valves (Flat nickel plated) M3 x 26 M4 x 31 SY3000-23-4 (M2 x 21) 22 Base Mounted Type How to Order Pilot Valve Assemblies How to Order Connector Assemblies 5 G SY114 30 4A SY100 DC: 30 1A SY100 100VAC: Indicator light/Surge voltage suppressor Rated voltage Nil

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 27 19 11 43 35 1/2 46 142 14 13 115 58 145 30 55 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 27 19 14 43 35 1/2 52 148 18 15 132 65 165 35 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 118 80 17 22 22 16

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(recommended) . 11-22 11.7 Relay (recommended) . 11-22 11.8 Noise reduction techniques . 11-23 11.9 Earth-leakage current breaker . 11-30 11.10 EMC filter (recommended) . 11-32 12.