Clean Room: Vacuum Suction Type, Magnet: Built-in, Mounting Direction: Lateral Mounting, Bore: 6mm, Stroke: 10mm, Rod End Thread: Rod End Male Thread, Auto Switch: F8N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Room: Vacuum Suction Type, Magnet: Built-in, Mounting Direction: Lateral Mounting, Bore: 6mm, Stroke: 15mm, Rod End Thread: Rod End Female Thread, Auto Switch: F8N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15 to 0.7, Specification: Built-in magnet

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT 111 to 11-34 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

AC Servo Motor Driver

manual adjustment) . 7 8 7.4 Interpolation mode . 7 -11 8.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Table of Contents

(Refer to page 14-19-11.)

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

EXxx-OMY0004

Fig. 11-2 Status indicators of the EX245-DX1 73 No.EX##-OMY0004 11.6.

EXxx-OMY0006CN

10-11 Bit 7 Ch3/7(3) Table 10-11 58 No.EX##-OMY0006CN 10.7.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating