Smooth Cylinder/Low Speed Cylinder

REA CDU Double Acting, Single Rod (mm) W B A W B D-M9A D-M9AV D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) REB A B W A B W A B W A 10 16 20 25 32 12.5 3.5 (-1.5)1 16.5 7.5 2.5 16.5 7.5 0.5 16.5 7.5 4.5 16.5 7.5 2.5 REC (-2)0.5 16 4 20 8 1.5 20 8 -0.5 20 8 3.5 20 8 1.5 (-4)-1.5 20 6 24 10 0 24 10 -2 24 10 2 24 10 0 CY (-5.5)-3 22.5 7 26.5 11 -1.5 26.5 11 -3.5 26.5 11 0.5 26.5 11 -1.5

Electric Slide Tables

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Series SV

With external pilot specification (Pitch) P = 24 11 25 24 20 13.7 E 3/5 E 3/5 E 3 E 3 4 4 A 4 A 4 A 4 A 4 A 4 A A 4 A 4 A 4 A 14.5 35.8 35 61.8 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9, 10, N11, 12 X PE x PE Rc 1/4, 3/8 [4(A), 2(B)

Electric Actuators

LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 240 5 phase to 200 224 284 2 phase to 200 238 5 phase to 100 218 to 30 2 phase 234 5 phase to 30 294 220 2 phase to 80 236 5 phase to 80 222 2 phase to 100 304 248 5 phase to 200 284 232 to 200 2 phase 246 5 phase to 100 226 2 phase to

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

Base Mounted Metal Seal/Rubber Seal Series VQ

B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 9 46 75 85.5 178 200 210.5 376 400 410.5 68 87.5 98 354 375 385.5 90 112.5 123 112 137.5 148 134 162.5 173 288 312.5 323 310 337.5 348 332 362.5 373 156 175 185.5 266 287.5 298 200 225 235.5 222 250 260.5 244 262.5 273 L1 L2 L3 How to Order Double

CA2

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hw Hw Hs Hs Ht Hs 40 13.5 0 11.5 12 15 23 8 0 0 0 18 3 15.5 0.5 40 31 38.5 31 38 50 14 0 12 12.5 15.5 23.5 8 0 0 0 18.5 3 16 0.5 43.5 35 42.5 35 43.5 63 18.5 0 16.5 17 20 28 9 0 0 1 23 4 20.5 1.5 85 85.5 93.5 49 42 91 91 93 48 42 50.5 80 22.5 1.5 20.5 21 24 32 11 0 0 3 27 6 24.5 3.5 93.5 94 102 55.5 50 107 107 101.5 54 50 59 100 25.5 2.5 23.5 24 27

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

AC Servo Motor Driver (CC-Link Type ）

[Unit: mm] E D A C F Logo etc, are indicated here. 39.0 23.8 5.2 B 12.7 Each type of dimension Connector Shell kit A B C D E F 10150-3000PE 10350-52A0-008 41.1 52.4 18.0 14.0 17.0 46.5 Applicable wire size: AWG24~30 11 5 11. OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 39.5 34.8 22.4 11.0 11 6 12.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

With lock/207) (60) (58) 37 LEH 21 (4) LEY -X5 50.8 45 11LEFS 11LEJS +0.030 0 6H9 ( ) depth 4 25ALEC B 30 n x 5.5 11 +0.030 0 6H9 ( ) depth 4 LEC S LEC SS-T 114 LEC Y LEC Y Motorless 64 200 LAT E C x 200 (= D) 20 LZ LC3F2 Note 1) Distance within which the table can move when it returns to origin.

High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

CG1

Note) Refer to p.1.7-11 for pivot bracket. 1-7-47 Series CG1Q With Mounting Bracket Clevis/CG1DQ Clevis (mm) Bore (mm) Stroke range (mm) B CD CX CZ L RR V TE TF TH 20 to 63 20 25 32 40 50 63 80 100 38 45.5 54 63.5 79 96 99.5 120 8 10 12 14 16 18 18 22 28 32 Up to 200 29 33 40 49 60 74 56 64 14 16 20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

LEC-OM071xx

DISCONNECT 11 Turn OFF the control and main circuit power supplies.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] Black 1) 2) 3) Black Black 5.5 1 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 0 28 1.0 4.2 0.2 UL-1015AWG16 1 3 2 4.5 0.5 41 1.0 12 36 13. COMMUNICATION FUNCTION 13.

CL

6 6 8 15 15 15 15 35 40 40 50 178 193 196 221 38 41 41 41 154 169 23 25 28.5 33 30 30 35 35 11 11 11 12 16 17 17 17 11 11 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 55 62 62 70 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

JXCx-OMU0004

1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m*

0.4

B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156 175 185.5 7 178 200 210.5 8 200 225 235.5 65.5 L1 L2 L3 4 4 4 B 25 2 (1.5) 37.5 A 7.5 17.5 4 L n 13 310 337.5 348 14 332 362.5 373 16 376 400 410.5 9 222 250 260.5 11 266 287.5 298 15 354 375 385.5 10 244 262.5 273 12 288 312.5 323 L1 L2 L3 How to Order Double check block Option VQ2000