2 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS32l1FSl-03-08(S) 8 13.2 22.7 33 14.2 AS32l1FSl-03-10(S) 10 15.9 26.7 37 28 15.6 29 (40) AS32l1FSl-03-12(S) 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-04-10(S) 10 1/2 24 (23.8) 3/8 19 16.6 AS 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS42l1FSl-04-12(S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS42l1FSl
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
Note 1) Please enter cable length in with reference to page 491. 429 Base mounted 10-SY3000/5000/7000 41 Type 42 Type Manifold Specifications Model Applicable valve Manifold type P(SUP)/R(EXH) Stations 10-SS5Y3-41 10-SS5Y3-42 10-SS5Y5-41 10-SS5Y5-42 10-SS5Y7-42 10-SY340 10-SY540 10-SY740 Single base / B mount Common SUP, Common EXH 2 to 20 stations Note 1) Base Side Location Direction A,
101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5 16 28 40 16 2 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 6 2 8.5 17.5 21.5 35.5 D-C7l/C80 D-C73C D-C80C 10 2.5 9.5 17 29 41 16 3 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 4.5 11.5 19 31 43 16 5 11 19.5
Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02
Caution Mounting screw tightening torques d M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm D A L Dimensions Applicable fitting size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 89 Type 41 42 Type 41P 42P Manifold spec. sheets Order made Type 45 Type 45Single valve A NA Features Precautions Type43 Type43P Manifold Options Single valve Type
Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.
N 10 04 Symbol Applicable tube O.D.
N 10 04 Symbol Applicable tube O.D.
N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)
32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5
) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14
) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04
16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.
A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12
41 26 20 2025 M10 x 1.25 6 8 37.5 5.5 Up to 700 22 19.5 17 10 13 10 45 32 26 32 M10 x 1.25 6 8 46.5 5.5 Up to 1000 22 19.5 17 12 13 11 45 32 26 Data 40 M14 x 1.5 8 10 56.2 7 Up to 1000 24 21 22 14 16 12.5 50 41 32 20, 25 NA NN P S TD TT TX TY TZ Z ZZ N Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 8 10 32 32 52 192 202 20 25 34.5 M26 x 1.5 Up to 700 1/8 146 9 10 40 40 60 196 206
VHS3003 VHS2002 VHS30-03 VHS4002 Note 6) 01 02 02 03 06 Piping adapter E100-M5 E200-02 E300-03 E300-03 E400-04 E500-06 E60010 E60006 E60006 10 10 03 04 04 06 Note 6) 02 01 02 02 Pressure switch 03 IS1000E-20 02 IS1000E-30 03 IS1000E-30 03 IS1000E-40 04 with piping adapter 03 04 04 06 Note 6) 01 01 01 02 03 Y14-M5 Cross interface Y24-02 Y34-02 Y34-02 Y44-03 Y54-04 Note 1) in part numbers