Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

X (12) 49 31.6 24.5 16 A A A A A A A A 9.5 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) P = 16 65 47 2 L n Dimensions Formula L1 = 16n + 77.5, L2 = 16n + 100.5 n: Station (Maximum 12 stations) 3 4 5 6 7 8 9 10 11 12 L1 L2 (L3) (L4) 109.5 125.5 141.5 157.5 173.5 189.5 205.5 221.5 237.5 253.5 269.5 132.5 148.5 164.5 180.5 196.5

0.4

x M12 VQ7 DIN rail clamp screw R R 0 76.5 BUS 3 3 X 1 X 1 60 49.5 B B B B B B B B 12 12 2 P P PWR 30 3 25 1 10 (12) 1 A A A A A A A A 13.5 25 M3 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C10: 10 One-touch fitting (C12: 12

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

0.4

fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

273 262.5 249 12 Stations L1 L2 L3 L4 C6C C8C VV5Z5-45FU DStation B(2 to 10 stations) Separation lever (Push type) C6C C8C VV5Z5-45FUStation C6C C8C VV5Z5-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) (mm) 2 123 112.5 97 13 3 148 137.5 116 16 4 160.5 150 135 13 5 185.5 175 154 16 6 198 187.5 173 12.5 7 223 212.5 192 15.5 8 235.5 225 211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

Series VQ Base Mounted Metal Seal/Rubber Seal

(For P, R ports) VVQ100050AC6 Applicable tube 6 Applicable tube 3.2 Applicable tube 4 C3 C4 Note) 10 pcs. per one set. Note) 10 pcs. per one set. !

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

CATALOG

25 A I R C U S H I O N E D 32 1, 2, 3, 4, 5, 6, 8, 10, 12 40 40 1, 2, 3, 4, 5, 6, 8, 10, 12 45 50 1, 2, 3, 4, 5, 6, 8, 10, 12 55 63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

SV

30% 10% 30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600

V

The minimum quantity to order is 10 pieces. Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 !

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Series VQ Metal Seal/Rubber Seal Body Ported

Name Material Number VVQ1000-80A-7-2 3 Bush assembly i VVQ1000-80A-7-4 12 Clip Stainless steel o Fittings Assembly No. !0 VVQ100050A Port size C3: Applicable tube 3.2 C4: Applicable tube 4 C6 : Applicable tube 6 (1) Note 1) Note 2) Standard SUP/EXH port is C6. 10 pcs. per one set. 1.10-109

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R