VM

I 10 I G H F E X H .

Table of Contents

17.5 2.5 24.5 25.5 13.7 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32 UNF 12.7 2.3 15.4 23 9.3 15.6 Applicable tubing 1 16 22 11.11 5 32 16 10.4 10 18 3 1 8 1 4 25 26 20 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 14.29 10-32 UNF 10-32 UNF 22 2.3 11.11 24 11.4 10 19.5 1 8 1 4 16.5 3

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

to Order SS5YJ7--40-05 -01 P port Rc(PT)1/4 Stations 01 Rc(PT)1/8 A, B port side 2 stations 02 : : 20 stations 20 R port Rc(PT)1/4 A, B port Rc(PT)1/8 Note) For more than 10 stations, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

KJ

17.5 2.5 24.5 25.5 13.7 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32 UNF 12.7 2.3 15.4 23 9.3 15.6 Applicable tubing 1 16 22 11.11 5 32 16 10.4 10 18 3 1 8 1 4 25 26 20 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 14.29 10-32 UNF 10-32 UNF 22 2.3 11.11 24 11.4 10 19.5 1 8 1 4 16.5 3

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

5

Bore size (mm) B D E F M T1 T2 RZQ Applicable air cylinder bore YA-03 32, 40 18 6.8 16 6 42 6.5 10 03 For 32, 40 05 For 50, 63 08 For 80 10 For 100 YA-05 50, 63 20 9 20 8 50 6.5 12 Mounting bracket YA-08 80 26 11 25 10 62 8.5 16 YA Type A mounting bracket YB Type B mounting bracket YU Joint YA-10 100 31 14 30 12 76 10.5 18 Part no.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ300 Manifolds for Internal Pilot 20 Type Applicable solenoid valve SYJ312-l-M3 SYJ312M-l-M3 SYJ322-l-M3 SYJ322M-l-M3 How to Order SS3YJ3--20-05 -A Port M3 X 0.5 Stations Bracket Applicable blank plate ass'y SYJ300-10-1A 2 stations 02 Without bracket R Port With bracket F ... ...

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Smooth Cylinder/Low Speed Cylinder

stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

D3 For 3 stations 10 SS5V U 1 05 16 1 D P D20 For 20 stations Note) For D0, only DIN rail mounting bracket is attached.

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

NCQ8

Contact protection circuit None D-A93 2.4 V or less (to 20 mA)/ 3 V or less (to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Indicator light Red LED lights up when ON Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) D-A90(V), D-A93(V) 2.8 x 10-4 in2 (0.18mm2) x 2 cores (Brown, Blue) D-A96(V) 2.3 x 10-4 in2 (0.15mm2) x 3 cores (Brown, Black, Blue) Note

2/3 Port Valve

1) 05 10 VXFC -2 05 10 VXFC -5 100V AC 200V AC 05 10 3A 1A 24V DC Power supply fuse ON time OFF time Time repeatability 0.01 to 1sec 0 to 120sec Max. 20% of set time 5, 10 0 to 50C 35 to 85% (No condensation allowed) MAX. 1A MAX. 0.5A 2000V Time setting How to Order Controller Number of output points Operating ambient temperature Operating ambient humidity Ouput current Noise resistance

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 20 For 20 stations Note) Note) Able to specify the length for 3 stations up to 18 stations for SV1000, which is available with 18 stations at the maximum.

MB

+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22

VFS

Cable VCTF 24 cores x 0.75 mm2 Plug: ML standard D type connector 25 terminals Cable: 25 core wire, 0.3 mm2 VVFS2000-30A-5 10 m VVZS3000-21A-5 10 m made by Tyco Electronics AMP K.K. VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto