Air Cylinder

301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32

Magnetically Coupled Rodless Cylinder

driving force Fn (N) 50 500 40 30 20 300 200 100 10 Usable range Usable range 5 20 30 40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range

Air Cylinder Series CA2

size (mm) AL B B1 C D E F G H1 J K KA LD LH LS LT LX LY A MQ 40 50 63 80 100 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 9.0 40 138 3.2 42 70 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 9.0 45 144 3.2 50 80 RHC 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 59 93 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 76 116 RZQ 40 37 116 41 92 30 52 14 21 16 M12

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Cylinder with Turntable Series MGT

40 50st or smaller 75, 100st 30 20 50 25, 50st 40 10 l 30 5 4 3 m 20 2 10 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) 300 300 200 MGTL80 P = 0.5 MPa 200 MGTM80 P = 0.5 MPa 100 Load mass m (kg) Load mass m (kg) 40 50 Larger than 75st 100 25st 50st 30 Larger than 50st 20 50 25, 50st 10 40 30 MGJ 5 4 3 20 MGP 2 10

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

MHZ

If the workpiece gripping point goes beyond the range limits, this will have an adverse effect on the life of the air gripper. 0.5 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 MHW 50 10 MRHQ 0 10 20 30 40 50 0 50 100 150 Misc.

MHZ

0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Rotary Gripper Series MRHQ

0.6 MPa 0.6MPa 8 15 Gripping force N Gripping force N 0.5MPa 0.5MPa 6 10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30 40 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Dimensions except A, L and L1 are the same as rod side flange style.

Compact Cylinder Series CQS

Attachable on 4 sides (20, 25) Attachable on 3 sides (12, 16) Auto switch CUJ CU CQS Bore size (mm) Stroke (mm) Page CQ2 Standard stroke Long stroke 12 16 5, 10, 15, 20 25, 30 5, 10, 15, 20 25, 30 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Standard 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 RQ Single rod CQS Double acting Double acting 551 35, 40, 45, 50, 75, 100 125, 150, 175, 200 75, 100, 125

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.