ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

1

Dimensions CP95 Cushion Rubber bumper (Standard equipment) NCM Stroke NCA Model, Bore size (mm) Applicable stroke 12, 16 5, 10, 15, 20, 25, 30 DCQS 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 -X 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CQ2 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20Data 6-17-37 32 Made to Order Common Specifications: Special Port Location

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Table of Contents

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

4.5 7 142 144 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16

SMC Pneumatic Clean Series

22 17 17 13 B1 45 41 41 37 H2 42.5 34.5 30 24 NA A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM NN Z 40 32 25 20 Bore size 50 45 45 41 16 13 13 13 6 6 5 8 8 8 5 4 4 4 75 75 75 M26 x 1.5 M20 x 1.5 26-0.033 0 26-0.033 0 M26 x 1.5 32-0.039 0 8 10 36 82 M32 x 2 25 Series CM2R 10-/1121-/22Direct mount type cylinder 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 58 127 134 10 52

Modular F.R.L. Unit

Optional specifications Note 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model V 38 38 45 45 B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 10 F.R.L.

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

V100

10 units.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

C95

] Mounting style (DS) Bore size (mm) E B1 B2 B3 TG1 T I1 (min) I2 FL H d1 d2 d3 CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

C95

50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140