Table of Contents

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

CRB2/CRBU2/CRB1

CRB2 15 Vane Type Rotary Actuator with Angle Adjuster Series CRB2BWU Sizes: 10, 15, 20, 30, 40 How to Order CRB2 10 WU B 180 S Standard Size 10 15 20 30 40 Size 10 15 With auto switch Sizes: 10, 15 90 L CDRB2 10 WU F 180 S CDRB2 20 WU B 180 S R73 L With auto switch Sizes: 20, 30, 40 Number of auto switches S Nil 1 pc.

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

5

19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 D32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39

Table of Contents

(mm) (2) Connection thread R D1 (1) A Weight (g) L1 L2 M L1 D2 Model Applicable tubing Nylon Urethane KQ2W23-M5 30 8 31 10 M5 x 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 D1 D1 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 D2 KQ2W04-M5 KQ2W04-01S 8 32 38.5 18 30 37.5 M5 x 0.8 11 3.0 3.0 8 10.4 L2 1 8 16 4 23 14 10 10 4.0 4.0 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 3 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Compact Rotary Actuator Series CRQ2

, 15 10, 15 20, 30, 40 10, 15, 20, 30, 40 10, 15, 20, 30, 40 Change in angle adjustable range 0 to 100 Change in angle adjustable range 90 to 190 Chart 5.

1

34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Besides, be certain that a snap ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50,

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

Table of Contents

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

Air Cylinder Series CM2

19 8 13 8 41 28 5 6 30 15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177