2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

Speed Controller: Standard Type Series AS In-line Type

-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 9 9 4.7 10 31 10.3 0.7 27.4 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Model T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Pressure range Switch 100 kPa 0 0.5 MPa 10 MPa 15 MPa 0.4 MPa 1 MPa 0 1 MPa For 1 MPa (For Air) ISE70 100 kPa (0.1 MPa) 1 MPa For 10 MPa (For General Fluids) 10 MPa 0 ISE75 10 MPa 0.4 MPa For 15 MPa (For General Fluids) 0 15 MPa ISE75H 0.5 MPa 15 MPa The ISE75(H) switch shows zero (0) when the pressure being applied goes below the lower limit of the set pressure range, when the cut-too-zero

ISE70/75/75H

1 2-color Display Digital Pressure Switch Series ISE70/75/75H ZSE ISE PSE Metal Body Type Metal Body Type Metal Body Type (Die-cast aluminum) Z I SE3 10 MPa 15 MPa 10 MPa 15 MPa 1 MPa 1 MPa For General Fluids For General Fluids PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

The set value can be copied to up to 10 switches simultaneously.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

High-Precision Digital Pressure Switch

The set value can be copied to up to 10 switches simultaneously.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Body Ported Type Vacuum Ejector ZH Series

10 One-touch One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 3 Booster Regulator Series VBA VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

PSE540/560

to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

PSxx-OMG0005CN

10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

MPa 5.0 MPa Rated pressure range 2.0 MPa 1.0 MPa 1.6 MPa 1.0 MPa Withstand pressure 1.5 MPa 2.4 MPa 3.0 MPa 5.0 MPa 12.5 MPa 30 MPa Power supply voltage When used as a switch output device 12 to 24 VDC 10% with 10% voltage ripple or less When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Temperature characteristics 2% F.S. (25C standard) 3% F .S.