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min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

min; Accumulated Flow: L; Temp.: °C)

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C4H (One-touch Fitting ø4mm, Straight Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Style: Pressure Switch with Piping Adapter, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 06 (3/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 50 (AC40-06), Thread Type: Rc, Port Size: 06 (3/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 50 (AC40-06), Thread Type: N (NPT), Port Size: 06 (3/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right