Series AP500

When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa). 12 Series AP1400T Single Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High inlet pressure Changes

Quick Exhaust Valve Series AQ

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Display + 12 to 24 VDC 2% F.S.1 digit (25C3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) A 8 12 B 10.5 16 C 6.4 10.2 E 4 6 ED 9.5 13 EK 4 6 F 12.5 25 G 10 9 H 45 75 HA 23 39 HI 23 39 HL 37.6 63.3 HP 44 73.5 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 L 67 90 LD 5.6 9.2 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 N 4.5 7.5 P 5/16-24 UNF 7/16-20 UNF PA 25 50 PB 60 100 PC 10 12 Q 112 147 QW 48

Speed Controller: Standard Type In-line Type AS Series

Description Material Body Cap 1 2 3 4 5 6 7 8 12 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Replacement Parts No. Description Material Parts no.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Description Material Note 1 Body A Zinc alloy 2 Handle Brass Electroless nickel plated 3 Body B Brass Electroless nickel plated 4 Needle Brass Electroless nickel plated 5 Needle guide Brass Electroless nickel plated (1) 6 Seat ring Brass Zinc chromate plated (3) Meter-out Steel (2) 7 Lock nut Black zinc chromate plated Meter-in 8 U seal HNBR 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 01

D-F6N/D-F6P/D-F6B

Additionally, note that the 12 VDC relay does not apply to the auto switch. 5.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Rated voltage Manual override Symbol Nil: Non-locking push type A: Non-locking push type (Manual) E: Push-turn locking type (Manual) DC AC (50/60 Hz) 2(A) 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] 5 24 VDC 6 12 VDC (P)1 3(R) Electrical entry Light/surge voltage suppressor DC AC Nil Without light/surge voltage suppressor S With surge voltage suppressor *1 DIN terminal

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Two Hand Control Valve

7 A(2) port P2(12) port w !2 !6 !4 !

VXA31/32

4.6 9.0 12 1.5 2.2 3 1.5 1.0 0.5 0.3 1.0 0.5 1.0 0.3 0.6 0.3 1.0 0.6 0.3 1 8 (6A) 280 2.2 410 280 1.0 1.5 (8A) 1 4 3 4 2.2 3 4 410 (10A) 3 8 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

VXH

AL 13 NBR 14 15 CR 16 DIN terminal Cable 6 to 12 Hexagon width across flats 22 DIN terminal Conduit terminal 2 x Rc , , 4 1 8 3 2 1 (For only VXH2230-04, Rc ) 2 x M5 x 0.8 x 8 2 1 For Rc 1/4, 3/8 334

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Applicable filter model Set description Spare element O-ring for cover I-68S-A I-62S-A I-63S-A Element size (mm) 6 x 4 x L25 12 x 8 x L20 16 x 12 x L25 ZFC05 ZFC10 ZFC20 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. Note) Spare elements and O-rings for the cover (Applicable filter: ZFC10, 20) are sold in sets of 10 pieces each. *Do not wipe with alcohol, etc.

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r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O12-24'/OC + '3 I 'liMe iAoa'Cg oUlpUl) + 1 2-2~VCC 12-24VOC ~ F='-'-F===""--, I I LE OIAUI I BIeC!

New

Flame resistant polyolefin (Equivalent to UL-94 standard V-0) Outer layer Middle layer Aluminum laminated film Inner tube Polyurethane 6-color variations Black White Red Blue Yellow Green Model P 20 m roll l 100 m reel Model TRTU1208 TRTU0604 TRTU0805 TRTU1065 6 8 10 12 Inner tube O.D. (mm) 4 5 6.5 8 Inner tube I.D.

CV/MVGQ

Valve Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Variations CL Standard variations Bore size (mm) Series Action Page Buit-in magnet With air cushion With One-touch fittings With auto switch With strong scraper MLGC CNA Series CVJ5 10 CB Double acting 16 3.5-6 CV/MVG CXW Series CVJ3 CXS Single acting (Spring return) (Spring extend) 10 3.5-12 16 CXT MX Series