Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL, PILOT C/VALVE, AIRLINE EQUIPMENT, FLOW CONTROL W/CHECK VALVE, FD, ASP 1/2 STANDARD (NPT), .52910 lb, ModelPort sizePilot portApplicable tubing O.D.

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CTRL, 1/8 NPT, AIRLINE EQUIPMENT, AS FLOW CONTROL, CD, AS 1/8INCH STANDARD (NPT), .07274 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), 0.03853 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, 1 1/2 PT, AIRLINE EQUIPMENT, AS FLOW CONTROL, JB, AS 1 1/2INCH STANDARD (PT), 6.79753 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm)

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS 1 1/2INCH STANDARD (NPT), AIRLINE EQUIPMENT, AS FLOW CONTROL, JD, AS 1 1/2INCH STANDARD (NPT), 7.33749 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

High Purity Fluoropolymer Needle Valve Series LVN 1

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04629 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04180 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

EX9-OEx_PE.eng

Element Description Power supply connector 1 Unused. 1 Power input connector Supplies power for output devices.1 2 To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. Power LED Indicates the power supply status. 3 2 1: Refer to for the Wiring.

Scale Cylinder & Counter Series CE

A phase B phase Signal 2 (1) A scale of magnetic layers and non-magnetic layers with a pitch of 0.8mm is cut into the piston rod. (2) With movement of the piston rod, a sin, cos 2-phase signal (Signal 1) is received by the magnetic resistance element. For this wave form, 1 pitch (0.8mm) becomes exactly 1 cycle. (3) This is amplified and divided into 1/8 parts.

IP Address Setting Tool (Interactive Type)

Definitions and Terminology (Supplementary Explanation) 15 -1No.EX-OMV1026-B 1.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .03740 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .03740 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CX, AS***F 1/8INC(MISC.