Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: E (Push-turn Locking Lever Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: N (NPT)

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: Rc (or None), Option: F2

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread:

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4),

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread:

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: F (G)

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread:

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

side oil mist concentrationRated flow (l/min (ANR)) Note 3)Bowl materialBowl guardRegulator constructionMass (kg)Air filterMist separatorRegulatorAC25CAF30AFM30AR251/4, 3/81/8Air?

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.88

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water & chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH FOR DIW AND CHEM, DIGITAL FLOW SWITCH, CHEMICAL, F11, 140.00000 lb

Model: 10 (200 L/min [ANR]), Pressure Range: 3 (0.005~0.5MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 3 (Switch Output PNP), Thread: F [G(PF)], Port Size: 2 [1/4 (1000,2000,3000)], Accessory: C (L Bracket), Cable Connector: N (w/oCable Connector), Pressure Display Unit: 4 (PSI)

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 1 (12~15VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 4 [1/2 (3000)], Accessory: B (Flat Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 2 (Switch Output NPN), Thread: N (NPT), Port Size: 2 [1/4 (1000,2000,3000)], Accessory: None, Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)