AZ1000

freezing) 1.6 2 x 10-11 Pam3/sec 1 x 10-10 Pam3/sec 4 x 10-9 Pam3/sec Ra 10 in. (0.25 m) Face seal, Tube weld 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 2.2 in3 (36 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume 42

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size 32 [mm] Bore size Arm opening angle A B C D E 25 90 148.4 69.4 72 30 30 105 152.5 73.5 32 90 157.7 73.6 71.5 40 35 105 3 Power Clamp Cylinder CKZT -X2797 -X2798 Dimensions: With Manually Operated Handle CKZT S-X2798 R L Refer to the CKZT S-X2797 (page 3) for dimensions other than those shown below. 47 42

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

SMC Pneumatic Clean Series

B 15 LT LH W Y X 2-LC (Knock pin position) W Y M X LX LZ Z LS + Stroke ZZ + 2 Stroke 4-LD (mm) 30 LH 78 LS 3 LT 54 LX 71 LZ B 54.5 70.5 82.5 4 LC 4 M 16.5 X 7 LD 10 W 8.5 Y Z 63.5 75.5 75.5 205 ZZ Bore size 40 40 45 91 91 4.5 4.5 66 82 86 106 50 63 5 5 5 5 22 22 10 12 11 13 242 242 17.5 17.5 Other dimensions are the same as basic style. 42 Air Cylinder 2122CG1W/ CG1W 1011Rod side flange

CP95

+0.15 GKM12-24 12 48 12 24 24 40 M12 x 1.25 62 +0.50 +0.15 GKM16-32 16 64 16 32 32 50, 63 M16 x 1.5 83 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 32 KJ10D 10 43 28 14 20 13 14 M10 x 1.25 40 KJ12D 12 50 32 16 22 13 16 M12 x 1.25 50, 63 KJ16D 16 64 42

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

CV/MVGQ

x 2 44.5 M14 x 1.5 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size HX Symbol Q QY Bore (mm) 20 25 32 40 S ZZ S ZZ ZZ S ZZ S ZZ S 20 25 32 40 65.3 19.8 191 137 166 112 141 87 14 70.5 22 195 137 170 112 145 87 14 76.5 25.8 197 164 222 139 172 114 147 89 16 84.5 29.8 229 188 254 213 279 163 204 138 179 113 16 10-15-42

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

preparation equipment 16 17+ST 4-M3 x 0.5 thread depth 4.5 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5 thread depth 3.5 Vacuum suction port 35 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port 61+ST ST 15 49.5+ST 3.5 8 13 1 M5 x 0.8 x 4L 4 16 14+ST 4.5 4.5 (Hexagon socket head set screw) M8 x 1.25 x 8L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42

Low Profile Guide Type

head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41 Chrome molybdenum steel Hexagon socket head plug Cylinder tube gasket Piston seal Scraper 42

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

3 Port Air Operated Valve VPA3145/3165/3185 Series

Precautions. 3 (EXH) 1 (IN) 3 (EXH) 1 (IN) Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 1574 3 Port Air Operated Valve VPA315 Series Flow Rate Characteristics/Weight Flow rate characteristics Weight (kg) Port size 12(INOUT) 23(OUTEXH) Valve model C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 0.35 45 XLA Construction/Operation XL XL Internal control

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Ejector Valve Unit Series ZYY/ZYX

ZU A B Manual override ZL A side: Orange (for supply valve) B side: Green (for release valve) 10.8 ZY ZF Release flow rate adjusting needle ZP (With indicator light and surge voltage suppressor) 33.3 Pressure setting trimmer (M3: Port PE) Pilot valve exhaust port SP Hysteresis setting trimmer Silencer ZCUK (AN203-KM8) 62 57 AMJ 50 42 34 29.5 23.5 21 AMV 10 Vacuum port AEP 6 One-touch fitting

S Couplers Series KK/KKH/KK13

or more 114 or more 29 or more 30 or more 38 or more 39 or more 56 or more 58 or more 70 or more 76 or more 82 or more 118 or more 144 or more 16 or more 20 or more 24 or more 30 or more 32 or more 40 or more 50 or more 48 or more 60 or more 64 or more 80 or more 3.2, 1/8" 4, 5/32" 3/16" 6 1/4" 8, 5/16" 10 3/8" 12 1/2" 16 T 28 to 30 NPT, R 1/2 28 to 30 NPT, R 3/4 36 to 38 NPT, R 1 40 to 42