SMC Corporation of America
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Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Evaporation thermometer Capillary tube 93 C IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

(Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41

AP100-02 500 Relief flow {l/min (ANR)} Dimensions 400 28 300 Panel cut dimensions 200 100 + 0 K P C U O 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 S L H 32.5 Set pressure (MPa) Note) The graph above shows the relief flow when the set pressure rises and falls from 0.1 MPa. 30 1.6 41 8.5 6.5 10 (69) 45.5 OUT IN 20 40 2 x 1/8, 1/4 40 758

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

Maximum operating pressure 145 psi (10.2kgf/crnZ) Ambhtnt and fluid temperature 41 140"F (5 60"C) (M3xO.Sx16L) D-P7 BOPt Switch mounting bracket screw 2 pes. D-PS 050 (M3xO.5xI 4L) Lubrication Non-lube Support typo Standard Switch mounting nul: 1 pc. Spring washer. 2 pes. Cu8hlon Not available Rod .d thread Male lhread (Sid.) Nominal diameter: 3mrn : ~1,,;; Thread tolerance J!

HF Handle position: Left Handle position: Right [mm] Bore size Arm opening angle HF Bore size H HA HD 50 250 61.5 40 63 250 64.5 40 15 36 30 49 45 61 60 73 75 87 90 101 105 114 120 124 50 15 41 30 55 45 68 60 81 75 94 90 107 105 117 120 124 63 5 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Clamp Arm Bore Size 50 Clamp Arm Code List Straight: Plain Bore size

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4

Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5

SU) S A (mm) A AU AV AW AX AY BA BB Size 1 YA 1 28 2.8 11 8.2 5.5 1.5 35 39.6 2 30 3.6 12.6 9.2 7 2 37 45.1 3 34.5 4.4 15.5 10.5 8 2.5 43 46.7 7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC (mm) BC BD BE BG BH BI BJ BK D DD DE FA FB FD H J JA JB JC JD JE JF JG Size M4 x 0.7 M4 x 0.7 1 4.5 32 17 11 8.2 30 4.5 5.3 27h9 27.5h9 14H9 4.8 2 3.7 9 3.3 6 3.5 2.2 5.3 4 M4 x 0.7 M4 x 0.7 2 5.5

switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41

Volume (cm 3) Single vane Double vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 31.5 41 33 34 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5

CRQ2X MSQX 15 16 M4 20 22.5 M6 MRQ 30 24.5 M8 L 40 28.5 M8 Auto Switch Proper Mounting Position (at Rotation End Detection) Solid state switch Reed switch Size Rotation angle A Operating angle ( m) Hysteresis angle B A Operating angle Hysteresis angle B ( m) 90 19 15 25.5 21.5 5 12 61 63 10 180 22 18 35 31 90 22.5 18.5 31 27 4 9 47 52 15 180 26.5 22.5 43.5 39.5 90 40 36 52.5 48.5 4 9 40 41

bolt Chrome molybdenum steel Hexagon socket head bolt Chrome molybdenum steel Hexagon socket head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41

steel Aluminum alloy Note 1) 7 35 15 or larger Chromated Piston Grease cup Carbon steel 8 36 Shaft Stainless steel Wear ring A Special resin 9 37 Zinc chromated Piston side yoke Rolled steel Wear ring Special resin 10 38 Zinc chromated External slider side yoke Rolled steel Wear ring B Special resin 11 39 Magnet A Cylinder tube gasket NBR 12 40 Magnet B Guide shaft gasket NBR 13 41

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41