30

B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size Maximum thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7 8 11 13.5 21

1

Rod JCM Series Basic (Female Thread on Rod Cover) (BZ) Stroke Bore size Port thread type JC MBZ D F GA Width across flats KA Port thread GB Width across flats B1 H1 C NA D E MM AL A H ZZ + Stroke S + Stroke NA C 4 x J Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 J KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21

Wireless System

Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply Cable with 7/8 Inch Connector/ Power Supply Connector p. 21

AR20-B to AR60-B

7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Series GS40 Digital Pressure Sensor

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

Series GS40 Digital Pressure Sensor 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

33

(White) (Black) (Green) Approx. 100 mm Grounding cable Circulating fluid fill port lid Circulating fluid outlet Rc1/2 Operation display panel 5005 mm 21 mm Circulating fluid return port Rc1/2 3775 mm Handle (Same for the opposite side) Power cable (3 m) with plug Fluid level indicator Model no. label 6155 mm 5805 mm 100 VAC 200 VAC 1235 mm 3485 mm Power cable Note) Dustproof filter Caster

energy saving effect

. * For HRSH250-A-20 Circulating fluid temperature [C] When a load is stable 0.1C Outdoor air temperature: 32C Circulating fluid temperature setting: 20C Heat load in the users equipment: 25 kW Power supply: 200 V 60 Hz Circulating fluid flow: 125 L/min@0.5 MPa External piping: Bypass piping + Heat load 21 Conditions 20 19 25 kW load Heat load fluctuation (0 kW 25 kW) 0 kW load 0 10 20 30

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105 (3.1) LEL Motor cable (6) 56 100 130 100 LEM 35 LEY Encoder cable (7) 25.5 36.5 64 Note 2) (128) Note 2) 94 5H9 ( ) depth 6 +0.030 0 6 50.5 LES 58 LEPY LEPS LER Encoder Z-phase detecting position L LEH A (Table traveling distance) (58) 167 (B: With lock/207) LEY -X5 (60) Stroke 17 37 (4) 21

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

Series AK1000

MPa) Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Air-hydro Unit

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Flow control valve Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

+0.030 4H9 0 depth 4.5 K cross view (Closed) +0.052 32H9 0 depth 1.5 Auto switch mounting groove (4 locations) 76 Width across flats 13 (4 locations) M5 x 0.8 (Finger closing port) 2 x M5 x 0.8 Vacuum port M5 x 0.8 (Finger opening port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port Finger opening port 4 x M4 x 0.7 thread depth 8 Finger closing port Finger opening port (A, B common view) M5 x 0.8 thread depth 5 Vacuum suction port +0.02 0 2 x 4 depth 8 44 Auto switch mounting groove (A, B common view) 14h9-0.043 0 18 1.5 55.5 9 24.6 2-3 3.4 4.7 37 (60) 21

Information

27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Compact Cylinder

Single knuckle joint material: Rolled steel Surface treatment: Nickel plated Double knuckle joint material: Rolled steel Surface treatment: Nickel plated Knuckle Pin (Common with Double Clevis Pin) Double Clevis Socket Dd9 2 x l 2 x (mm) Dd9 L 21 23 27 31 d 7.6 7.6 9.6 9.6 Part no.

Rotary Actuator/Vane Style Series CRB2

MSZ 2 20 CRQ2X MSQX 0 -0.030 4 6.5 10 MRQ 30 45 Body B (90) h Keyway dimensions b l Body A h (h9) l b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2 x M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE 10g6 -0.005 -0.014 0 -0.052 25h9 B port A port 63 20 2 x M5 x 0.8 Connection port for side port 21 D3 x 5.5 depth 17.5 (Body A side only) 3 x 5.5 depth

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Pg7 Max.10 74.6 16 33.8 33.5 37 30.5 Manual override part IN OUT Breathing hole (6.2) 13.7 OUT 2 1 IN 3 EXH 71 EXH 32 2 x M4 x 0.7 thread depth 8 (for bracket mounting) Applicable cable O.D. 3.5 to 7 Details of manual override part (for manual operation) 50.8 43.3 Type A 25 6.5 49 (20) G3/8 [3(R) port] (21) Type E 48.9 LOCK PUSH 4 VP500/700 Series Dimensions VP717 Mounting hole (for M8)