range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C
min 0.35 to 4.5 L/min 1.7 to 17.0 L/min 7 to 110 L/min 3.5 to 45 L/min 0.35 to 4.5 L/min 2 to 16 L/min 10 to 100 L/min 5 to 40 L/min 0.5 to 4 L/min 0.1 L/min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5 L/pulse 0.05 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB
75 kPa to 0.25 MPa1.4 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.38 MPa0 to 50C0 to 50C (with no condensation)20 lFreeIP40 or equivalent34 g (without sub-plate), 42 g (with sub-plate)12, 24 VDC?10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB