NCA1

ZF + Stroke A MM KK A B E EE FB LF+ P+ R TF TH UF WF ZF+ ZJ+ 1.000 3/4-16 1.13 1.500 5.50 1/2 NPT .50 4.50 2.88 4.10 6.63 2.75 7.63 1.38 6.50 5.88 Bore Size (in) 500 (5") 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 1.63 7.38 6.63 8 MS1 Foot style (L) XA+ Stroke A P + Stroke 2-EE KK MM B AH AT LF + Stroke WF S AB E AO SA + Stroke AO Bore Size (in) MM KK A

Wedge Cam Operation Provides

(mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

Lightweight and Compact

Standard item HRSE Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v HRZ Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

Compact Type

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

IDU/IDF

P-80 (YG)

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Model: 0 to -101kPa, Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Large blow and

Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185

MLGP

When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large.

MLGP

Bore size 20, 25/MLGPM20/25 (Slide bearing) Operating Range as Stopper for MLGPM20/25 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

ITV

Flat bracket Dimensions L-bracket Description Part no.