Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Posiiton, Closed Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Position, Dual Pressure Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Position, Dual Closed Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 2-position, Dual Pressure, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Position, Dual Exhaust Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 2-position, Dual Pressure, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 3-Position, Pressure Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 3-Position, Dual Exhaust Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Metal, Configuration: 3-Position, Pressure Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

PFxx-OMP0001CN

Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

PF3A7xxH_eng

PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). 4 Snap shot function The current flow rate value can be stored to the switch output ON/OFF set point.

PF3A8xxH.eng

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E--Bracket dimensions----INA-11-4041 4, 3 8, 1 28017015

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .