HRX-OM-X010

1-75 HRX-OM-X010 Chapter 1 Safety 1.8.7 Refrigerant R448A 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-76 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-77 1-77 HRX-OM-X010 Chapter 1 Safety 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-78 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-79 1-79 HRX-OM-X010 Chapter 1 Safety

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

1 FKM:No.1349-80 ** [] AS568-025-XN1 7 XL-OMY0001 / 16 25 40 50 XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLA Series

Note3) We do not guarantee the quality if the seal material is changed by customer. 6 XL*-OMI0009-E Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials

XLA- ∗ -F7NJ ∗ - ∗ Series

(Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75

XL-OMV0002

227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XL-OMY0002

** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XLDV Series

Note2) Refer to the Construction of each series for the construction numbers. 6 XL-OMM0005-A Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used

High Vacuum L Type Valve

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

XL-OMY0003

-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24** B2401-P42 ** AS568-227 ** 1) FKM:No.1349-80** AS568-025-XN1 2) 4 3) FKM for EPDM Barrel ULTIC ARMOR R R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification LEKFS*G Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 50 to 800 50 to 1000 150 to 1200 Horizontal 15 28 40 40 50 68 26 60 75 Work load [kg] Note2) Vertical 3 7.5 15 4 10 18 4.5 4.5 25 Up to 400 20 to 1500 12 to 750 6 to 500 24 to 1300 16 to 1000

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Product weight [kg] Model Stroke Additional weight with lock Size 50 75 100 150 8 1.06 1.23 0.16 16 1.87 2.26 0.32 25 3.50 4.10 4.90 0.61 -5- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Case of D type Component parts No. Description Material Remarks No.

JXCx-OMY0006

Controller and Peripheral Devices/Specific Product Precautions 75 18.1 Design and selection 75 18.2 Handling Precautions 76 18.3 Mounting 77 18.4 Wiring 77 18.5 Power supply 78 18.6 Grounding 78 18.7 Maintenance 78 -3No. JXC-OMY0006-A 19. Troubleshooting 79 20. Handling of sent/received data 85 21. Definitions and terminology 86 -4No. JXC-OMY0006-A JXC9H/Controller 1.

JXCx-OMX0009

The move to the position set in Step No. 2 is completed. 50mm Pushing completed position End position 75 - 14.

SFOD-OMT0005CN

OFF (SVRE OFF )[LK RLS]DC24V LK RLS LK RLSDC24V LK RLS (EMG) /(LEC ) -73- 18 18.1. / JXC91EEPROM1,000,000 -74- 18.2 ON 5 () -75- 18.3 18.4 () -76- 18.5 18.6 D(100) 18.7 -77- 19 ,, (), YES NO JXC LED 1 MSNS 2 ALM 3 (LEC-W2) 4 5 -78- No. 3(P.12) 5(P.23) SVON ON PWR() 1 LED 5. (P.23) 6.

JXCx-OMT0062

INP is turned ON. 75 - 14.2 Operating procedure for operation by numerical instruction Operation by numerical instruction is possible in all modes. The following shows an example in the half numerical data instruction mode.