Air Slide Table

10 20 30 40 50 60 0 0 0 10 20 30 40 50 60 70 80 90 L3: Overhang Allowable range: 60 mm L3: Overhang Allowable range: 90 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20(A)-75Z MXQ20(A)-100, 125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 V = 300 1 1 V = 300 0 0 20 40 60 80 100 120 0 0 50 100 150 200 250 300

15

0 0 0 5 10 20 15 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] Vertical 1500 1500 1500 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] Z L8 500 500 500 Mep m 0 0 0 0 4 6 2 8 10 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 Work load [kg] Calculation of Guide Load Factor Mounting Orientation 1.

EXxx-OMY0006CN

Passivation/xxx)Byte 0Zone1-3Zone M Bit 0 IO (Zone M) 0: OFF, 1: ON 1 1 (Zone 1) 0: OFF, 1: ON 2 2 (Zone 2) 0: OFF, 1: ON 3 3 (Zone 3) 0: OFF, 1: ON 47 0 Table 10-8 Safety Mode (Module Passivation/xxx)Byte1 Zone M Output feedback parameter Bit 2 Bit 1 Bit 0 OFF 0 0 0 0 0 1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 ON 0 0 0 0 0

Hydraulic

-0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d E F G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 10 23 60 44 12 21 17 18 45

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

LX

0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw

Made to Order

(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -

Tie-rod Type Hydraulic Cylinder

0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25 M14

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

5

0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 4.5 1.5 8.5 5.5 11 8 16 13 4.5 1.5 8 5 10 7 7.5 4.5 MQ 100 14 12 10 8 4 2 8 6 10.5 8.5 15.5 13.5 4 2 7.5 5.5 9.5

Smooth Cylinder/Low Speed Cylinder

0.033 0 0.033 0 0.033 0 0.039 (mm) Mounting bracket is supplied with the product.

Fieldbus system Ethernet POWERLINK compatible SI unit

, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 01h Channel 0 .. .. .. 300Bh Slot0_AnalogRange 0: -10..+10V, 1: -5..+5V, 2: -20..+20mA, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 04h Channel 3 00h NumberOfEntries 4 01h Channel 0 0: None, 1: 2 value (default) , 2: 4 value, 3: 8 value .. .. .. 300Ch Slot0_AnalogFilter 04h Channel 3 0: None, 1: 2 value

Compact

] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg]

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 Axis 2 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 1 Axis 3 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 > > > > > > > > > > > > > > Axis 1 SYN-I 500 100.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 2046 Axis 3 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 Axis 1 CIR-R 500 0.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis

EXxx-OMN0037CN

2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -22No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 16 (2 ) 10 (2 ) -1010 V -55 V -2020 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0

CL

0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

LJ1H

100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

1

3.5 +0.013 +0.001 3.5 2.8 0.5 6 16 0.1 4 M3 x 0.5 4 3.5 1 3 5.5 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.75 +0.1 0 +0.2 0 0.05 0.15 0 0.2 +0.2 0 6 6 5.5 1.25 4.5 6.5 8 5 6.5 5 CXS10 5 3.2 1 C0.5 3.5 20 0.1 +0.016 +0.001 M5 x 0.8 M3 x 0.5 4 +0.2 0 +0.2 0 0 0.2 0.05 0.15 +0.3 0 8 8 7.5 2 5 9.5 8 7 8 6 CXS15 +0.016 +0.001 6 5.2 1.5 C0.5 5.5 25 0.1 M6 x 1.0 M5 x 0.8 5 3 +0.3 0 0 0.2 +0.2 0 +0.2 0 CXS20