High Vacuum L Type Valve

Period and scope of warranty The warrantyd period covers the period which finishes the earliest among 0.1 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XLJ- -*G1 Series 25 40

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 0.5 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XMC/XYC Series

Warranty period and guaranteed range The guaranteed period covers the period which finishes the earliest among 2 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

FGE-C

FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18

Air cylinder

Port (3) Rod seal (2) Seal retainer (1) Retaining ring Fig. 4 Replacement of rod seal 18 - 3-2.

CM2x-OM0230Q

(XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

MWP_E

Replace the switch with a new one if the problem is not solved. switch -18- Basic Construction Fig.5 MWPU63-40-5-** Assembly drawing Fig.6 MWPU63-40-5-** Assembly drawing Fig.7 MWPQ125-40-5-** Assembly drawing Fig.8 MWPQ125-40-5-** Assembly drawing -19- Fig.5 -20- Fig.6 -21- Fig.7 -22- Fig.8 -23- Revision history Initial Release SZ Edition A *Document report P.13 TP Edition B *Document report

CEx-OMB0075

This is equivalent to a field in a radius of about 18 cm from a welding part using welding current of about 15000 amperes.

CE

No.CE*-OMI0063-C / / CE1* Series 1. 16 2. 7 2-1. 7 2-2. 78 2-2-1. 7 2-2-2. 8 2-2-3. 8 2-3. 9 3. 3-1. 10 3-2. 10 3-3. 11 3-3-1. 11 3-3-2. 11 3-3-3. 11 4. 4-1. 12 4-2. 12 4-3. 12 5. 5-1. 13 5-2. 14 5-3. 14 6. 6-1. 1516 6-2. 16 CE1B12 17 CE1B20 18 CE1B32 19 CE1B40 20 CE1B50 21 CE1B63 22 CE1 Series/ 1. 1) (ISO/IEC)(JIS) 2) *1) ISO

Solid State Auto Switch

No.D-S-OMK0010-H PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-M9#A# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 10 Mounting and Installation 11 Installation 11 Circuit diagram 12 Troubleshooting 13 Specification 17 Specifications 17 Dimensions 18 -1No.D-S-OMK0010-H Safety Instructions

Heat Resistant Solid State Auto Switch

No.D-S-OMS0002-B PRODUCT NAME Heat Resistant Solid State Auto Switch MODEL / Series / Product Number D-M9#J# Series Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Definition and terminology 9 Mounting and Installation 10 Installation 10 Maintenance 12 Troubleshooting 13 Specification 17 Specifications 17 Dimensions 18 -1No.D-S-OMS0002-B Safety

Trimmer Auto Switch

No.D-S-OMG0006-C PRODUCT NAME Trimmer Auto Switch MODEL / Series / Product Number D-M9K/D-F7K/D-Y7K D-RNK/D-RPK Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 13 Wiring 13 Internal circuit 15 Offset adjustment 17 Installation 18 Setting 19 Maintenance 32 Troubleshooting 33 Specification

CRB2-OM00001

This may cause human injury and/or an accident. (18) Refer to the Auto Switches Precautions when using with an auto switch. Selection Caution (1) Do not use below the adjustment range specified for the product.

Rotary Actuated Air Gripper

alloy Hard anodized 13 Back-up ring Stainless steel 14 Hexagon socket head bolt Stainless steel 3 Guide holder Stainless steel 4 Cam Steel Nitriding 15 Bearing High carbon chrome steel 5 Finger assy Stainless steel Heat treatment 6 Guide Stainless steel Heat treatment 16 Cylindrical roller Stainless steel 7 Pin Carbon steel Heat treatment Electroless nickel plated 17 Cover Aluminum alloy 18

Toggle Type Air Gripper

M12x1.75 42.2 Attachment Tightening with a torque above the limit can cause malfunction, while insufficient tightening can cause slippage and dropping. 6 - Mounting Gripper Axial mounting Cylinder tapped Side mounting Side plate tapped Model Screw Max. tightening Max. thread torque (Nm) depth (L mm) MHT2-32DZ M6x1 6.1 10 MHT2-40DZ M6x1 6.1 10 MHT2-50DZ M8 x 1.25 15.8 14 MHT2-63DZ M10x1.5 32.6 18

Air Gripper Unit for Collaborative Robots

KQ2L04-M3G1 Cross recessed round head screws TCU0425B-1 Base cover 4) Remove 4 tubing (No.1 to No.4) and 6 tubing (white) from the opening. 5) Connect the 4 tubing {tubing No. should be the same as the air port No. to which the One-touch fitting is connected in step 1 above)} and white 6 tubing with a One-touch fitting (KQ2H04-06A1). 4 tubing 6 tubing One-touch Fittings 18 Finger open / close

MHx-OMZ0004

M3x7 0.59Nm 17 - 12 (No.1No.4)KQ2L04-M3G1 KQ2L04-M3G1 2(TCU0425B-1) 3(M44 ) TCU0425B-1 44 (No.1No.4)6 () 5(KQ2H04-06A1)1)4 6 () 4 6 KQ2H04-06A1 18 - () 19 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

MHx-OMZ0005

Nm JMHZ2-16D M3x0.5 0.59 17 - MOTOMAN-HC10 M6x12 6.3Nm 18 - M6x23 6.3 Nm M4x10 1.0Nm 19 - M8 M8 M8-MOLEX S1 S2 M4x8 1.0Nm 20 - (M4x6) (M4x6) 1.0Nm P175-2. M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.